Integrated Capacitance Diaphragm Gauge for Line Charge Volume

Solution Overview

Problem

Existing semiconductor processing equipment face challenges in accurately measuring and delivering precise bursts of gases due to measurement errors and inefficiencies in pressure sensing, particularly in line charge volume systems with separate pressure gauges, leading to suboptimal gas delivery and prolonged purging times.

Innovation Solution

Integration of a capacitance diaphragm gauge directly within the line charge volume chamber, allowing for direct pressure sensing and eliminating measurement errors, enabling faster and more efficient gas delivery by correlating diaphragm deflection to pressure volume, and reducing purging inefficiencies through airtight seals and efficient gas flow management.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a separate capacitance diaphragm gauge is used to measure pressure in the line charge volume, then pressure measurement is possible, but measurement errors occur due to pressure differences between the gauge and the charge volume

Engineering Contradiction:

Improvepressure measurement accuracyVSAvoidpressure reading error

Core Design Contradiction:

Measurement precisionVSLoss of information

Solution Approach 1:

The pressure sensor is integrated directly into the line charge volume chamber, merging the measurement device with the measured system. This eliminates the separate pressure sensing path and ensures the sensor measures the actual pressure of the gas in the charge volume without transmission errors or equilibrium delays.

Inventive Principle:

Principle #5Merging (Combining)

2Ease of manufacture

If a separate pressure gauge is used outside the line charge volume chamber, then the chamber structure remains simple, but purging becomes inefficient due to dead leg volumes

Engineering Contradiction:

Improvechamber structure simplicityVSAvoidpurging time

Core Design Contradiction:

Ease of manufactureVSLoss of time

Solution Approach 1:

The pressure sensor is integrated directly into the line charge volume chamber, merging the measurement device with the measured system. This eliminates the separate pressure sensing path and ensures the sensor measures the actual pressure of the gas in the charge volume without transmission errors or equilibrium delays.

Inventive Principle:

Principle #5Merging (Combining)

3Productivity

If pressure is measured using a separate gauge, then the line charge volume can be charged, but waiting time for pressure equilibrium is required

Engineering Contradiction:

Improvegas delivery speedVSAvoidequilibrium waiting time

Core Design Contradiction:

ProductivityVSLoss of time

Solution Approach 1:

The pressure sensor is integrated directly into the line charge volume chamber, merging the measurement device with the measured system. This eliminates the separate pressure sensing path and ensures the sensor measures the actual pressure of the gas in the charge volume without transmission errors or equilibrium delays.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution provides accurate and efficient mass measurement of gases, independent of charging methods, reduces waiting times for equilibrium, and enhances the precision and speed of gas delivery to semiconductor reactors, improving the quality of thin film deposition processes.

Implementation Method 1

The measurement side includes electronics for measuring a capacitance value corresponding to the deflection of the diaphragm

Methodology Applied

Scientific EffectCapacitance: Capacitance

Implementation Method 2

pressure produced by a gas that is provided into the chamber via the inlet port produces a force upon the diaphragm

Methodology Applied

Scientific EffectPressure: Pressure Increase

Data Source

PatentUS10312119B2Line charge volume with integrated pressure measurement

Publication Date: 2019.06.04 LAM RES CORP

AI summary

A line charge volume and methods for use in delivery of gas to a reactor for processing semiconductor wafers is provided. The line charge volume includes a chamber that extends between a first end and a second end, and the first end includes an inlet port and an outlet port. A pressure sensor is integrated with the chamber. The pressure sensor has a measurement side for measuring a deflection of a diaphragm. The diaphragm is directly exposed to an interior of the chamber so that pressure produced by a gas that is provided into the chamber via the inlet port produces a force upon the diaphragm. The measurement side includes electronics for measuring a capacitance value corresponding to the deflection of the diaphragm. The deflection is correlated to a pressure difference, and the pressure difference is equivalent to a pressure volume (Pv) of the chamber.