Integrated Electron Gun Cathode Structure for Stable Thermal Emission

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional cathode mechanisms in electron guns experience unstable resistance and insulation breakdown due to mechanical and electrical contact issues, leading to inefficient heating and unstable thermal electron emission.

Innovation Solution

A cathode mechanism with a crystal heated by an integrated structure of supporting posts and base parts made of the same material, eliminating mechanical and electrical contact points to stabilize resistance and prevent insulation breakdown, while efficiently heating the crystal for stable thermal electron emission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a conventional cathode is assembled by mechanically combining multiple parts through which currents flow, then the cathode structure can be constructed with separate components, but the resistance of the entire cathode becomes unstable due to multiple electric contact portions

Engineering Contradiction:
Improvecathode assemblyVSAvoidresistance stability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent merges multiple separate parts (supporting posts and base parts) into a single integrated structure made of the same material. This eliminates the multiple electric contact portions that caused unstable resistance, while still allowing the cathode to be manufactured by forming one unified component rather than assembling multiple pieces.

Inventive Principle:
Principle #5Merging (Combining)

2Reliability

If multiple parts through which currents flow are fixed within a ceramic insulating part, then the cathode structure can be supported and insulated, but the temperature of the ceramic increases during heating, causing insulation breakdown

Engineering Contradiction:
Improveinsulation performanceVSAvoidceramic temperature
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The patent extracts and removes the ceramic insulating part from the cathode structure. By eliminating the ceramic component entirely, the source of insulation breakdown at high temperatures is removed. The integrated structure of supporting posts and base parts made of the same material provides both mechanical support and electrical insulation without relying on ceramic materials that fail at elevated temperatures.

Inventive Principle:
Principle #2Taking out (Extraction)

3Reliability

If an integrated structure made of the same material is used for supporting posts and base parts, then resistance stability is improved and insulation breakdown is prevented, but the manufacturing process requires forming a unified structure

Engineering Contradiction:
Improveresistance stabilityVSAvoidstructure fabrication
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent combines supporting posts and base parts into a single integrated structure made of the same material. This merging approach improves resistance stability by eliminating multiple electric contact portions, while the manufacturing process achieves this unified structure through a single forming operation rather than assembling multiple components, thereby maintaining ease of manufacture.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides stable resistance and prevents insulation breakdown, ensuring efficient heating and stable thermal electron emission, enhancing the reliability of the electron gun's performance.

Implementation Method 1

the crystal is heated by supplying a current to the integrated structure

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

a crystal configured to emit a thermal electron from an end surface by being heated

Methodology Applied
Scientific EffectThermal electron emission: Thermionic Emission

Data Source

PatentUS11430628B1Cathode mechanism of electron gun, electron gun, and electron beam writing apparatus
Publication Date: 2022.08.30 NUFLARE TECH INC
  • US11430628B1 patent drawing
  • US11430628B1 patent drawing
  • US11430628B1 patent drawing

AI summary

A cathode mechanism of an electron gun includes a crystal to emit a thermal electron from an end surface by being heated, a holding part to hold the crystal in a state where the end surface is exposed and at least a part of other surfaces of the crystal is covered, a first supporting post and a second supporting post each to support the holding part and extend while maintaining an unchanged sectional size, a first base part to fix the first supporting post, and a second base part to fix the second supporting post, wherein the holding part, the first supporting post, the second supporting post, the first base part, and the second base part are formed in an integrated structure made of the same material, and the crystal is heated by supplying a current to the integrated structure.