Integrated Cyclotron Structure for Compact X-Ray Generation
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Solution Overview
Problem
Cyclotrons used for producing short-wavelength optical radiation, such as x-rays, are typically large and expensive, limiting their use and consuming scarce funding.
Innovation Solution
A miniaturized, integrated cyclotron device is developed using semiconductor manufacturing processes, comprising a semiconductor substrate with electron emitters and resonator electrodes, capable of producing short-wavelength radiation through electron acceleration in a magnetic field.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional cyclotron design is used, then short-wavelength radiation production capability is achieved, but device size becomes large and cost becomes expensive
Solution Approach 1:
The cyclotron is divided into discrete functional layers including electron emitter array, resonator electrodes, and interconnect stack with vias, allowing independent optimization and miniaturization of each component while maintaining overall functionality
Solution Approach 2:
The cyclotron structure transitions from a planar two-dimensional configuration to a three-dimensional stacked architecture utilizing vertical vias and multiple electrode layers, enabling compact integration while preserving the necessary electromagnetic field geometry for radiation production
2Reliability
If traditional cyclotron design is used, then short-wavelength radiation production capability is achieved, but device cost becomes expensive
Solution Approach 1:
The resonator electrodes serve dual functions as both electromagnetic field generators and structural support elements, while the interconnect stack provides both electrical connectivity and mechanical alignment, reducing the need for separate specialized components and lowering overall device cost
Solution Approach 2:
The device operates by adjusting resonator frequency and electron beam parameters rather than requiring large physical dimensions, enabling cost-effective miniaturization through parameter optimization rather than scaling up physical infrastructure
3Volume of moving object
If miniaturized cyclotron structure is used, then device size is reduced, but manufacturing complexity increases
Solution Approach 1:
The electron emitter array is integrated within the interconnect stack structure, with vias providing both electrical connections and structural alignment features, creating a nested hierarchical arrangement that simplifies assembly despite the miniaturized scale
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the production of short-wavelength radiation in a compact and cost-effective manner, suitable for applications like medical imaging and security scanning.
Implementation Method 1
A compact, integrated cyclotron device is developed, utilizing a semiconductor substrate with an electron emitter array and an interconnect stack that includes resonator electrodes and vias, allowing for the production of short-wavelength radiation
Data Source
AI summary
An electronic device includes a first resonator electrode and a second resonator electrode in an interconnect stack over a semiconductor substrate. The first resonator electrode includes a first lower resonator electrode, a first upper resonator electrode and a first plurality of vias between the first lower resonator electrode and the first upper resonator electrode. The second resonator electrode includes a second lower resonator electrode, a second upper resonator electrode, and a second plurality of vias between the second lower resonator electrode and the second upper resonator electrode. A cavity in the interconnect stack is bounded by the first resonator electrode and the second resonator electrode. An electron emitter extends from the semiconductor surface between the first and second resonator electrodes and is configured to direct electrons into the cavity. The electronic device may be operated to produce short wavelength radiation, e.g. x-rays.