Integrated Differential Amplifier for Silicon Pressure Sensor Signal

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Solution Overview

Problem

Silicon-based pressure sensors face challenges in cost-effectiveness due to the need for large diaphragms to produce sufficient signal output for low-pressure transducers, making it difficult to interface with control electronics efficiently.

Innovation Solution

Incorporating a differential amplifier on the same die as the pressure sensor, allowing for signal amplification and routing the output to pads for connection with control electronics, enabling cost-effective production and calibration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the diaphragm size is increased to produce sufficient signal output for low-pressure transducers, then the signal output is improved, but the die size and manufacturing cost increase

Engineering Contradiction:
Improvesignal outputVSAvoiddie size
Core Design Contradiction:
Measurement precisionVSArea of stationary object

Solution Approach 1:

The patent merges the amplifier circuitry with the pressure sensor on the same die, creating an integrated device. This allows the small diaphragm to work with signal amplification without requiring a larger die area, thus maintaining cost-effectiveness while achieving sufficient signal output for control electronics.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The differential amplifier acts as an intermediary between the small diaphragm sensor and the control electronics. It amplifies the weak signal from the small diaphragm to a level suitable for interfacing with control electronics, eliminating the need for a large diaphragm while maintaining signal sufficiency.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If the diaphragm size is increased to produce sufficient signal output, then the signal span is improved, but the manufacturing cost becomes prohibitive

Engineering Contradiction:
Improvesignal spanVSAvoidmanufacturing cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

By combining the amplifier and sensor on one die, the patent eliminates the need for external amplification components and large diaphragms, reducing manufacturing complexity and cost while maintaining sufficient signal span for control electronics.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The integrated differential amplifier serves as an intermediary that boosts the signal from the small diaphragm to an appropriate level, enabling cost-effective manufacturing with small diaphragms while still providing sufficient signal span for industrial applications.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Measurement precision

If signal amplification is added to the pressure sensor, then the signal output is improved, but the device complexity increases

Engineering Contradiction:
Improvesignal outputVSAvoidcircuit complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent integrates the differential amplifier circuitry directly into the pressure sensor die, creating a unified device. This merging approach, while adding functional complexity, reduces overall system complexity by eliminating external amplification components and wiring.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables cost-effective production of silicon-based pressure sensors with enhanced sensitivity and ease of interfacing with control electronics, allowing for accurate temperature and pressure calibration.

Implementation Method 1

The topside of a typical pressure sensor includes implanted piezoresistors to convert the pressure to an electrical signal

Methodology Applied
Scientific EffectPiezoresistive effect: Piezoresistive Effect

Data Source

PatentUS7493823B2Pressure transducer with differential amplifier
Publication Date: 2009.02.24 HONEYWELL INTERNATIONAL INC
  • US7493823B2 patent drawing
  • US7493823B2 patent drawing
  • US7493823B2 patent drawing

AI summary

A semiconductor-based pressure sensor adapted for enhanced operation with controls electronics includes a pressure transducer having an output formed on a silicon die and an amplifier having an input and an output and fabricated on the silicon die next to the pressure transducer. The pressure transducer's output is provided to the amplifier's input via electrical connection. Output from the amplifier is connectable to a controller such as an ASIC.