Integrated Electrode Device for Microminiaturized Pressure Sensors
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Solution Overview
Problem
Existing electrostatic capacity type pressure sensors face difficulties in microminiaturization due to challenges in assembling thin diaphragm plates with small movable electrodes, leading to production inefficiencies and accuracy issues related to parallel and distance errors between electrodes.
Innovation Solution
An electrode device with an integrated electrode portion and elastically deformable portion, where the electrode portion is displaced axially upon force application, and the elastically deformable portion is hermetically fixed to the base, forming an air chamber that communicates with an air nozzle, allowing for deformation without assembly errors and improved manufacturing efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the capacitor plate and elastic member are manufactured separately and assembled, then the sensor can be manufactured using conventional processes, but the assembly process becomes complex and error-prone
Solution Approach 1:
The patent merges the capacitor plate and elastic member into a single integrated component. The capacitor plate is formed as an integral part of the elastic member, eliminating the need for separate assembly operations. This integration resolves the technical contradiction by maintaining ease of manufacture through conventional single-step fabrication processes while simultaneously reducing assembly complexity to zero.
2Volume of moving object
If the sensor is microminiaturized, then the sensor size is reduced, but the assembly of thin diaphragm plate with small movable electrode becomes difficult
Solution Approach 1:
The patent integrates the movable electrode and diaphragm plate into a single microminiaturized component. By forming the electrode as an integral part of the diaphragm plate through conventional fabrication processes, the invention enables easy manufacturing of microminiaturized sensors without the assembly difficulties that would arise from trying to join separate thin diaphragm plates with small electrodes.
3Adaptability or versatility
If separate assembly of diaphragm plate and movable electrode is performed, then manufacturing flexibility is maintained, but assembly errors cause parallel and distance errors affecting accuracy
Solution Approach 1:
The patent combines the diaphragm plate and movable electrode into a single integrated component with built-in alignment features. The electrode is formed as an integral part of the diaphragm plate, ensuring inherent parallelism and precise spacing. This integration maintains manufacturing flexibility through conventional single-step processes while eliminating assembly errors that would compromise electrode alignment precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution simplifies the assembly process, enhances fixing accuracy, and improves the manufacturing efficiency of the sensor by eliminating assembly errors and ensuring high linearity and accuracy in pressure measurements.
Implementation Method 1
the elastically deformable portion can deform correspondingly and the electrode portion is displaced axially
Implementation Method 2
when a force is applied to the pressure sensing element, the elastically deformable portion can deform correspondingly
Data Source
AI summary
Provided are an electrode device, a pressure sensor and an electronic pressure meter. The electrode device may comprise: an electrode portion; and an elastically deformable portion arranged on a radial peripheral of the electrode portion. The electrode portion is integrated with the elastically deformable portion such that when a force is applied to the electrode device, the elastically deformable portion can be deformed correspondingly and the electrode portion can be displaced axially.