Integrated Electron Multiplier with Shielded MCP and Anode
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Solution Overview
Problem
Conventional electron multipliers are costly and lack reliability, particularly in applications like mass spectrometry and semiconductor inspection, due to complex configurations and high part counts, which can lead to instability and charge-up issues.
Innovation Solution
An electron multiplier configuration that integrates the micro-channel plate and anode on an insulating substrate with a metal shield, utilizing bleeder circuits and conductive fastening members to reduce parts, suppress charge-up, and stabilize operation, while simplifying the wiring and reducing the number of components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional electron multiplier configuration is used with separate components, then the functional requirements are met, but the number of parts increases and cost increases
Solution Approach 1:
The patent combines the micro-channel plate and anode into a single integrated component mounted on an insulating substrate. The micro-channel plate has the anode formed on its output surface, eliminating the need for separate mounting and wiring of these components. This merging reduces the number of parts while maintaining the electron multiplication and detection functions, directly resolving the contradiction between reliability and device complexity.
2Reliability
If multiple separate components are used in the electron multiplier, then the functional requirements are met, but the wiring complexity increases and cost increases
Solution Approach 1:
The integrated structure of the micro-channel plate with the anode formed on its output surface reduces wiring complexity. The electrical connections are simplified because the anode is directly connected to the micro-channel plate output, eliminating the need for separate wiring harnesses and connection points that would be required for discrete components.
Solution Approach 2:
The insulating substrate serves multiple functions: it provides mechanical support for the micro-channel plate, provides electrical insulation between high-voltage components, and serves as the mounting platform for the integrated structure. This multi-functionality reduces the need for additional components and wiring, thereby reducing overall device complexity while maintaining reliability.
3Reliability
If the micro-channel plate is left exposed without shielding, then the configuration is simpler, but charge-up occurs and operation stability decreases
Solution Approach 1:
A metal shield is introduced as an intermediary component between the micro-channel plate and the external environment. This shield prevents charge accumulation on the micro-channel plate by providing a conductive path for stray electrons, thereby stabilizing operation. The shield is integrated into the overall structure and connected to the insulating substrate, adding minimal complexity while significantly improving reliability.
4Reliability
If more wiring and components are added to the electron multiplier, then the functional requirements are met, but the cost increases
Solution Approach 1:
The integration of the anode onto the micro-channel plate output surface eliminates the need for separate mounting brackets, wiring harnesses, and connection components. This reduces the total bill of materials and assembly steps, directly lowering manufacturing cost while maintaining the reliable electron multiplication and detection function.
Solution Approach 2:
The insulating substrate performs multiple functions including mechanical support, electrical insulation, and structural integration of the micro-channel plate and anode. By consolidating these functions into a single component, the design reduces the number of parts that need to be manufactured, procured, and assembled, thereby reducing overall manufacturing cost while ensuring operational stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces costs, enhances reliability, and stabilizes the output signal by minimizing charge-up and simplifying the electronic setup, making it suitable for high-reliability applications.
Implementation Method 1
when the electrons are incident on a channel of the micro-channel plate to which a voltage has been applied, the electrons repeatedly collide with a sidewall in the channel and secondary electrons are emitted such that the electrons are multiplied
Data Source
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AI summary
An electron multiplier 100 includes an insulating substrate 11 which includes an electrical wiring pattern 20 and in which a through-hole 16 is formed, an MCP 12 arranged on one side of the through-hole 16 of the insulating substrate 11 and electrically connected to the electrical wiring pattern 20, a shield plate 13 arranged in one side of the MCP 12and electrically connected to the MCP 12, an anode 15 arranged on the other side of the through-hole 16 and electrically connected to the electrical wiring pattern 20, and a signal readout terminal 19 fixed to the insulating substrate 11 for reading a signal from the anode 15. The shield plate 13 is formed to include the MCP 12 when viewed in a thickness direction. A through-hole 27 exposing at least a portion of the MCP 12 is formed in the shield plate 13. The insulating substrate 11, the MCP 12, the shield plate 13 and the anode 15 are fixed to each other to be integral.