Integrated Electron X-ray Detector for Particle Beam Inspection
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Solution Overview
Problem
Conventional particle beam systems face challenges in combining information from electrons and X-rays due to the magnetic electron trap affecting the primary beam focus and occupying space, making it difficult to arrange both detectors close to the sample, resulting in separate inspections with different effects on the focused primary beam.
Innovation Solution
A semiconductor detector capable of detecting both electrons and X-rays is used, arranged close to the sample, allowing for the separation of signal components related to electrons and X-rays by analyzing detection signals in intensity and energy spectra, enabling simultaneous detection and analysis of both types of signals.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a magnetic electron trap is used in the X-ray detector to prevent secondary electrons from generating detection signals, then the X-ray detection is improved, but the primary particle beam focusing is affected and space is occupied preventing the electron detector from being arranged close to the sample
Solution Approach 1:
The patent combines the electron detection function and X-ray detection function into a single detector unit. The detector has a first detection unit for detecting secondary electrons and a second detection unit for detecting characteristic X-rays, eliminating the need for separate detectors and the magnetic electron trap that would interfere with beam focusing.
Solution Approach 2:
The detector is designed to perform multiple functions simultaneously: detecting both secondary electrons and characteristic X-rays from the sample. This multi-functional detector replaces the need for separate specialized detectors and resolves the spatial conflict between electron detection and X-ray detection components.
2Measurement precision
If separate detectors for electrons and X-rays are used, then each detector can be optimized for its specific function, but it is not possible to arrange both detectors close to the sample
Solution Approach 1:
The patent merges electron detection and X-ray detection into a single integrated detector positioned close to the sample. This combination allows both types of signals to be detected simultaneously at minimal distance from the sample, maintaining detection accuracy while eliminating the spatial separation problem.
3Loss of information
If the electron detector and X-ray detector are alternatingly arranged close to the sample for separate inspections, then both types of information can be obtained, but the two detectors have different effects on the focused primary beam making it difficult to combine the information
Solution Approach 1:
The patent enables continuous simultaneous detection of both secondary electrons and characteristic X-rays during a single inspection process. The integrated detector captures both signal types continuously as the particle beam scans the sample, eliminating the need for alternating inspections and allowing direct correlation of structural and compositional information.
Solution Approach 2:
By combining electron detection and X-ray detection in one detector, the patent allows both inspection processes to occur simultaneously during a single scan, merging what were previously separate alternating inspections into one continuous operation that produces correlated data sets.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the simultaneous detection of electrons and X-rays, improving the combination of structural and elemental information from the sample, enhancing the accuracy and spatial resolution of inspection results.
Implementation Method 1
a detector (47) which detects electrons and X-rays incident on the sample
Data Source
Figure 1
Figure 2~3
Figure 4~5
AI summary
An inspection method comprises focusing a particle beam onto a sample; operating at least one detector located close to the sample; assigning detection signals generated by the at least one detector to different intensity intervals; determining, based on the detection signals assigned to the intensity intervals, at least one first signal component related to electrons incident on the detector; and determining, based on the detection signals assigned to the intensity intervals, at least one second signal component related to X-rays incident on the detector.