Integrated Exhaust Switching Mechanism for Fast Sealed Maintenance
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Solution Overview
Problem
Conventional substrate processing devices require a large number of opening/closing mechanisms for exhaust switching, making attachment and detachment difficult, which increases assembly and maintenance time.
Innovation Solution
An integrated opening/closing mechanism with a base member, actuator, rod, lid member, and link member that can be easily attached to the switching box, facilitating the attachment and detachment process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple opening/closing mechanisms are provided for each exhaust switching mechanism, then the exhaust path can be switched between multiple exhaust pipes, but the number of components increases and attachment/detachment becomes difficult
Solution Approach 1:
The patent combines multiple opening/closing mechanisms into a single integrated mechanism. The switching mechanism includes a single body with multiple lids that can independently open/close different exhaust paths, eliminating the need for separate mechanisms for each exhaust pipe while maintaining full switching capability.
Solution Approach 2:
The single opening/closing mechanism is designed to perform multiple functions by incorporating multiple lids and communication ports. This universal mechanism can switch exhaust paths to different exhaust pipes, replacing the need for multiple specialized mechanisms while maintaining adaptability.
2Adaptability or versatility
If multiple opening/closing mechanisms are provided for each exhaust switching mechanism, then the exhaust path can be switched between multiple exhaust pipes, but assembly and maintenance time increases
Solution Approach 1:
By merging multiple opening/closing mechanisms into one integrated unit with a single body and multiple lids, the patent reduces the total number of components that need to be assembled and maintained. This single mechanism can be installed and serviced as one unit rather than multiple separate mechanisms.
Solution Approach 2:
The mechanism is segmented into modular components (body, lids, link members) that can be independently accessed and maintained. This segmentation allows for easier maintenance of individual parts without requiring disassembly of the entire mechanism.
3Ease of manufacture
If a single integrated opening/closing mechanism is provided, then attachment becomes easier and assembly time is reduced, but the structure becomes more complex
Solution Approach 1:
The integrated mechanism is divided into distinct functional segments (body, lids, link members, actuators) that are clearly defined and can be manufactured separately then assembled. This segmentation simplifies the manufacturing process while achieving the integrated functionality.
Solution Approach 2:
Link members serve as intermediaries between the actuators and lids, simplifying the mechanical connection. These link members translate actuator motion into lid opening/closing motion, making the overall structure easier to manufacture and assemble.
4Ease of operation
If multiple separate opening/closing mechanisms are provided, then each can be independently controlled, but the overall system requires more components and space
Solution Approach 1:
Multiple independently controllable mechanisms are merged into a single body with multiple lids, each lid being independently operable. This reduces the total component count while preserving independent control capability for each exhaust path.
Solution Approach 2:
The single opening/closing mechanism body is designed to provide multiple functions through its multiple lids and communication ports, eliminating the need for multiple separate mechanisms while maintaining independent control over each exhaust path.
Data Source
AI summary
An opening/closing mechanism includes a base member that can be attached to attachment openings of a switching box, an upper support member provided on an upper surface of the base member, an actuator, a rod extended downward from the actuator while penetrating the base member and moved in an up-down direction by the actuator, a lower support member provided on a lower surface of the base member, a lid member provided below the base member and capable of closing a communication port, and a first link and a second link provided below the base member and configured to connect the rod, the lower support member, and the lid member. The movement of the rod is transmitted to the lid member via the first link and the second link, so that the lid member is switched between an open state and a closed state.