Integrated Gas Box Layout for High-Voltage Ion Source Arcing Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Ion implantation systems face a high risk of arcing and subsequent component damage due to high voltage, leading to system unavailability and extended downtime.
Innovation Solution
An integrated gas box system that houses gas canisters and power supplies within a single enclosure, with the ion source sealed within a bushing, maintaining vacuum conditions and sharing the same voltage as the enclosure, reducing electromagnetic interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If gas canisters and power supplies are disposed in a separate enclosure (gas box) biased at high voltage, then the ion source can be biased at high voltage, but the likelihood of arcing increases and component damage risk increases
Solution Approach 1:
The system is divided into two electrically isolated segments: the high-voltage ion source chamber and the atmospheric enclosure containing power supplies. The bushing acts as an electrical insulator separating these segments, allowing the ion source to operate at high voltage while protecting atmospheric components from arcing damage
Solution Approach 2:
The bushing serves as an intermediary component that provides both mechanical support and electrical insulation. It allows the ion source to be biased at high voltage while preventing direct electrical contact with atmospheric components, thereby reducing arcing risk
2Power
If gas canisters and power supplies are disposed in a separate enclosure, then high voltage bias is maintained, but system complexity increases due to umbilical cables and separate enclosure
Solution Approach 1:
The gas canisters, valves, and power supplies are merged into a single atmospheric enclosure, eliminating the need for separate gas box and power supply enclosures. This integration reduces the number of umbilical cables and simplifies the overall system structure while maintaining high voltage bias capability
3Power
If the ion source is separate from the gas box, then high voltage operation is possible, but availability decreases due to extended downtime from component replacement
Solution Approach 1:
The atmospheric enclosure is designed to house spare power supplies and gas canisters in advance. When arcing damage occurs, replacement components are already available within the enclosure, eliminating the need for extended downtime and component replacement delays
Data Source
AI summary
An integrated gas box is disclosed. The integrated gas box is an enclosure, wherein one wall of the enclosure includes an aperture. A bushing is affixed to the exterior of this wall. The distal end of the bushing has a flange that is affixed to a wall of the vacuum chamber. The ion source is introduced into the bushing through an access door in the enclosure and slides into the aperture. The base flange of the ion source is sufficiently large such that it cannot pass through the aperture and forms a seal between the bushing and the interior of the integrated gas box. The integrated gas box includes the gas canisters and associated valves which are used to supply feed gas and diluent gasses to the ion source. The integrated gas box also houses the power supplies used to bias the components within the ion source.