Integrated Gas Sensor in Multistage Vacuum Pump

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Solution Overview

Problem

Conventional gas-specific vacuum leak detectors are complex and costly, with separate gas sensors that are not integrated with the vacuum pump, leading to inefficiencies and increased system complexity.

Innovation Solution

A gas-specific sensor is integrated into a multistage vacuum pump, allowing it to detect gases directly within the pump, reducing system complexity and cost by eliminating the need for a separate sensor and housing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a separate gas sensor is used outside the vacuum pump, then the gas detection function is achieved, but the system complexity and cost increase

Engineering Contradiction:
Improvegas detection functionVSAvoidsystem complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The gas sensor is integrated directly into the vacuum pump housing, merging two previously separate components (vacuum pump and gas sensor) into a single unified device. This eliminates the need for separate sensor housings and connections, directly reducing system complexity while maintaining gas detection functionality.

Inventive Principle:
Principle #5Merging (Combining)

2Reliability

If a separate gas sensor with separate housing is used, then gas detection is possible, but manufacturing cost increases

Engineering Contradiction:
Improvegas detection capabilityVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

By integrating the gas sensor into the existing vacuum pump housing, the patent eliminates the need for separate sensor housing manufacturing, assembly, and installation processes. This reduces manufacturing steps, material requirements, and assembly costs while maintaining the gas detection capability.

Inventive Principle:
Principle #5Merging (Combining)

3Adaptability or versatility

If multiple separate components (pump, sensor, housing) are used, then functional requirements are met, but the number of components increases

Engineering Contradiction:
Improvefunctional requirementsVSAvoidnumber of components
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The vacuum pump housing is designed to serve multiple functions: it houses the vacuum pump stages, provides structural support, and integrates the gas sensor mounting and protection. This multi-functional design reduces the number of separate components needed while maintaining all required functionalities.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the sensitivity and efficiency of gas detection within the vacuum pump, simplifying the system while maintaining effective detection of gases like hydrogen, helium, CO2, and hydrocarbons, and reducing the need for additional components.

Implementation Method 1

a test chamber (16) is connected to a multistage vacuum pump (12) in order to evacuate the test chamber (16)

Methodology Applied
Scientific EffectPressure difference: Pressure Gradient

Implementation Method 2

a gas-specific sensor (34) which is an integral part of the vacuum pump (12) and thereby is configured to detect a specific gas inside the vacuum pump (12)

Methodology Applied
Scientific EffectGas-specific detection:

Data Source

PatentUS20250020534A1Vacuum leak detector with multistage vacuum pump and integrated gas-specific gas sensor and method for producing a vacuum leak detector
Publication Date: 2025.01.16 INFICON GMBH
  • US20250020534A1 patent drawing

AI summary

A gas-specific vacuum leak detector has a multi-stage vacuum pump and a gas-specific gas sensor. The gas sensor is an integral part of the vacuum pump and is thereby adapted to detect a specific gas within the vacuum pump.