Integrated Gas Stick Substrate for Compact Leak-Resistant Delivery
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Solution Overview
Problem
Conventional gas delivery systems in substrate processing have large footprints, require frequent maintenance, and suffer from increased downtime and substrate irregularities due to removably attached components and extensive piping, leading to decreased yield and quality.
Innovation Solution
A gas delivery system with integrated gas sticks formed via additive manufacturing, where each gas stick has a common substrate portion, reducing the overall system size and minimizing the need for separate components, thus decreasing maintenance and leaks while enhancing flexibility and efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If removably attached components and extensive piping are used in gas delivery systems, then ease of assembly and disassembly is improved, but system footprint increases and maintenance frequency increases
Solution Approach 1:
The patent integrates multiple gas delivery components (gas sticks, flow controllers, valves, and piping) into a single monolithic substrate structure. This merging eliminates the need for separate removably attached components and extensive external piping, thereby reducing system footprint while maintaining operational functionality.
Solution Approach 2:
The patent transitions from a distributed three-dimensional arrangement of separate components to a planar two-dimensional integrated substrate. By embedding flow paths and components within a single flat substrate, the system achieves compactness without sacrificing assembly ease, as the entire structure can be manufactured as one piece through additive manufacturing.
2Ease of repair
If removably attached components are used in gas delivery systems, then ease of repair is improved, but reliability decreases due to increased maintenance and leaks
Solution Approach 1:
By combining all gas delivery components into a single integrated substrate, the patent eliminates multiple connection points and interfaces where leaks could occur. The monolithic structure ensures consistent sealing and reduces maintenance needs, thereby improving reliability while maintaining repairability through modular substrate replacement.
3Adaptability or versatility
If extensive piping and separate components are used, then adaptability is improved, but device complexity increases
Solution Approach 1:
The patent divides the gas delivery system into multiple functional zones within the substrate, with dedicated flow paths for different gases (e.g., CF4, SF6, Cl2). Each zone can be independently configured and manufactured, allowing adaptability for different gas combinations while keeping the overall structure simple and integrated.
4Manufacturing precision
If additive manufacturing is used to create integrated substrate, then manufacturing precision is improved, but ease of manufacture decreases
Solution Approach 1:
The patent utilizes additive manufacturing parameters (layer thickness, infill density, material composition) to optimize substrate production. By adjusting these parameters, the system achieves high manufacturing precision for complex integrated structures while maintaining ease of manufacture through digital modeling and automated fabrication processes.
Data Source
AI summary
A gas delivery system includes a substrate. The substrate includes a first substrate portion of a first gas stick. The first substrate portion includes a first inlet configured to receive a first gas. The first gas stick is to control first flow of the first gas. The substrate further includes a second substrate portion of a second gas stick. The second substrate portion includes a second inlet configured to receive a second gas. The second gas stick is to control second flow of the second gas separate from the first flow of the first gas. The gas delivery system is to provide the first gas and the second gas to a chamber of a substrate processing system.