Integrated Gate Field Plate Transistor for Reduced Die Area

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Transistor devices, particularly power transistors and high voltage devices, face challenges in achieving optimal breakdown voltage and manufacturing simplicity due to the need for separate control terminals and field plates, which increases complexity and area occupancy.

Innovation Solution

A conductive structure is designed to serve as both a control terminal and a field plate, with a vertical channel region and a horizontally oriented extended drain region, allowing for adjustable breakdown voltage and simplified manufacturing by using a single structure for both functions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If separate control terminals and field plates are used in transistor devices, then the breakdown voltage can be optimized, but the device complexity and area occupancy increase

Engineering Contradiction:
Improvebreakdown voltageVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines the control terminal and field plate into a single integrated conductive structure. This structure includes a gate region that serves as the control terminal and a field plate region that extends from the gate, both formed as one continuous conductive element. This merging eliminates the need for separate control terminals and field plates while maintaining the electrical field control functionality, thereby reducing device complexity and area occupancy while preserving breakdown voltage characteristics.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The integrated conductive structure performs multiple functions simultaneously: it acts as both a control terminal for regulating current flow through the channel and as a field plate for controlling the electric field distribution in the extended drain region. This multi-functionality allows a single structure to replace what would traditionally require separate components, reducing overall device complexity while maintaining optimal breakdown voltage performance.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If separate control terminals and field plates are used, then electrical field control is improved, but die area occupancy increases

Engineering Contradiction:
Improveelectrical field controlVSAvoiddie area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

By merging the control terminal and field plate into a single integrated conductive structure, the patent reduces the total die area required. The field plate extends laterally from the gate region and is formed as one continuous structure, eliminating the need for separate control terminals and reducing overall area occupancy while maintaining effective electrical field control across the extended drain region.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The field plate extends in the lateral dimension from the gate region, allowing electrical field control to be achieved through spatial extension rather than requiring additional vertical stacking or separate lateral components. This dimensional approach enables effective field control while minimizing the footprint area occupied by the device structures.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Area of stationary object

If a vertical channel region is used, then die area is reduced, but manufacturing complexity may increase

Engineering Contradiction:
Improvedie areaVSAvoidmanufacturing process
Core Design Contradiction:
Area of stationary objectVSEase of manufacture

Solution Approach 1:

The device is segmented into distinct functional regions: a vertical channel region for current flow, an extended drain region with drift region for voltage handling, and an integrated conductive structure with gate and field plate regions for control. This segmentation allows each region to be optimized independently while maintaining compatibility with standard semiconductor manufacturing processes, balancing area reduction with manufacturability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs parameter changes in the doping concentrations and geometrical dimensions of various regions to optimize device performance. By adjusting doping levels in the extended drain region and channel region, and by controlling the dimensions of the vertical channel and field plate extension, the device achieves optimal breakdown voltage and electrical characteristics while remaining compatible with existing manufacturing capabilities.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS10749028B2Transistor with gate/field plate structure
Publication Date: 2020.08.18 NXP USA INC
  • US10749028B2 patent drawing
  • US10749028B2 patent drawing
  • US10749028B2 patent drawing

AI summary

Disclosed herein is a conductive structure that serves as both a control terminal and a field plate for a transistor. The transistor includes a channel region including a portion located in a vertical sidewall of semiconductor material that separates an upper level portion and a lower level portion of the semiconductor material. An extended drain region includes a portion located in the lower portion of the semiconductor material. The conductive structure is laterally adjacent to the vertical sidewall and includes a first vertical side and an opposite second vertical side with the first vertical side being closer to the vertical component sidewall. The first side is vertically closer to the lower level portion of the semiconductor material than the second vertical side.