Integrated Gas Heat Conduction Hydrogen Sensor
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Solution Overview
Problem
Existing hydrogen gas heat conduction type sensors are bulky due to separate packages for sensing and reference elements, and are affected by humidity, leading to measurement errors and increased costs for humidity correction.
Innovation Solution
An integrated hydrogen sensor structure with a chip containing a substrate with spaced membranes forming sensing and reference elements, a heater for Joule heat generation, and an open hole for gas contact, where the heater's high temperature minimizes humidity influence, allowing for a single package design and reduced volume.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If separate packages are used for sensing and reference elements, then measurement accuracy is maintained, but sensor volume increases
Solution Approach 1:
The patent combines the sensing element and reference element into a single integrated chip structure. Both elements are fabricated on the same substrate with identical geometric patterns, allowing them to experience the same environmental conditions while maintaining their functional distinction. This merging eliminates the need for separate packages while preserving measurement accuracy through differential measurement techniques.
Solution Approach 2:
The integrated chip serves multiple functions simultaneously: it acts as both the sensing element (exposed to hydrogen gas through openings) and the reference element (protected by a membrane), while also providing thermal management and structural support. This multi-functionality reduces the overall sensor complexity and volume.
2Reliability
If separate packages are used for sensing and reference elements, then functional performance is maintained, but production cost increases
Solution Approach 1:
The patent integrates both sensing and reference elements on a single chip using conventional semiconductor fabrication processes. This allows both elements to be manufactured simultaneously in the same production line, eliminating the need for separate packaging, assembly, and quality control steps for individual elements, thereby significantly reducing production costs.
Solution Approach 2:
The patent modifies the geometric parameters of the sensing and reference elements during fabrication to optimize their performance characteristics. By controlling the pattern dimensions, material layers, and structural geometry during the fabrication process, the sensor achieves high reliability while maintaining cost-effective manufacturing.
3Measurement precision
If humidity correction is implemented through additional sensors, then measurement accuracy is improved, but device complexity increases
Solution Approach 1:
The patent extracts the humidity sensitivity issue from the measurement system by designing the sensing element geometry and material composition to minimize water vapor adsorption. The sensor structure is optimized to be predominantly sensitive to hydrogen gas while reducing cross-sensitivity to humidity, eliminating the need for separate humidity correction mechanisms.
Solution Approach 2:
The patent uses the reference element as a copy of the sensing element structure that is protected from gas exposure. This reference copy experiences the same environmental conditions including humidity, allowing the system to differentiate between humidity effects and hydrogen detection through differential measurement, without requiring additional humidity sensors.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The integrated design reduces sensor volume, lowers production costs, and eliminates the need for separate humidity correction, enabling accurate hydrogen detection without additional sensors.
Implementation Method 1
a heater for Joule heat generation
Implementation Method 2
gas heat conduction type hydrogen sensor
Data Source
AI summary
Disclosed is a hydrogen sensor having an integrated structure, the sensor being usable even in poor conditions, having a greatly reduced volume, minimizing the influence of humidity, and facilitating mass production thereof at low cost.