Integrated Ion Pump Gas Sensor for Interfering Gas Removal
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Solution Overview
Problem
Gas sensors that utilize an ion pump as a separate component lose the advantages of low cost, small size, and low power consumption due to the need for additional components and complexity in actual use environments, where interfering gases can affect the detection of target gases.
Innovation Solution
A gas sensor configuration that integrates a work function type gas sensor with an ion pump and a gas diffusion prevention film, where the ion pump is integrated with the sensor element, allowing for efficient removal of interfering gases while maintaining the advantages of low cost, small size, and low power consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an ion pump is provided as a separate part to counteract interfering gases, then the gas sensor can accurately detect target gases, but the advantages of low cost, small size, and low power consumption are lost
Solution Approach 1:
The ion pump is integrated into the semiconductor substrate of the gas sensor, merging two previously separate components (sensor and ion pump) into a single unified device. This integration eliminates the need for separate ion pump housing, power supply, and control circuits, thereby maintaining low cost and small size while enabling interfering gas removal for accurate detection
Solution Approach 2:
The semiconductor substrate serves dual functions: as the base for the work function type gas sensor and as the housing/substrate for the ion pump. The gate insulation film and gate electrode structure serve both as the sensing element and as part of the ion pump electrode assembly, achieving multi-functionality with a single integrated structure
2Measurement precision
If an ion pump is provided as a separate part to counteract interfering gases, then the gas sensor can accurately detect target gases, but small size advantage is lost
Solution Approach 1:
The ion pump components (ion conductive film, first ion pump electrode, second ion pump electrode) are nested within the semiconductor substrate structure. The ion pump is essentially embedded inside the sensor housing, with the gate layer and gate insulation film serving as shared structural elements between the sensor and ion pump functions, achieving compact nested integration
3Measurement precision
If an ion pump is provided as a separate part to counteract interfering gases, then the gas sensor can accurately detect target gases, but low power consumption advantage is lost
Solution Approach 1:
The ion pump shares the semiconductor substrate and associated circuitry with the gas sensor, eliminating the need for separate power supply circuits and control systems. The integrated structure allows for shared signal processing and control logic, reducing overall power consumption compared to separate standalone components
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables accurate and efficient gas sensing by removing interfering gases, achieving high accuracy and maintaining the benefits of low cost, small size, and low power consumption, while suppressing the influence of interfering gases on the sensor's performance.
Implementation Method 1
The ion pump includes an ion conductive film, a first ion pump electrode formed to be in contact with a lower surface of the ion conductive film, and a second ion pump electrode formed to be in contact with an upper surface of the ion conductive film
Implementation Method 2
a gas diffusion prevention film formed between the work function type gas sensor and the ion pump
Data Source
AI summary
A sensor element includes a sensor FET provided in a main surface of a semiconductor substrate, a cavity provided in the sensor FET and into which a detection target gas is introduced, and an ion pump provided over the cavity. By laminating the ion pump over the sensor FET via the cavity, a part of a front surface of a gate layer is exposed to the cavity, and a part of a lower surface of an ion pump electrode is exposed to the cavity. When the gate layer comes into contact with the detection target gas, a work function changes, so that gas concentration can be detected.