Integrated Magnetron Plasma Torch for Compact Spectroscopy

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Solution Overview

Problem

Current microwave power subsystems for generating microwave-induced plasma are bulky, costly, and inefficient due to their multi-component configuration, which limits their suitability for portable and cost-effective applications, especially in rural or developing markets, and suffer from electromagnetic field pattern mismatches that compromise performance and stability.

Innovation Solution

A compact plasma source system integrating a microwave energy source with a plasma torch, featuring a cathode and an anode with resonant cavities, directly couples microwave energy to the plasma torch, eliminating the need for external microwave hardware and leveraging rotational symmetries to achieve efficient energy transfer and stable plasma generation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a multi-component microwave power subsystem configuration is used, then microwave-induced plasma can be generated, but the system becomes bulky, costly, and complex

Engineering Contradiction:
Improveplasma generation capabilityVSAvoidsystem complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines the microwave power source, resonant structure, and plasma generation components into a single integrated device. The magnetron is positioned within the resonant cavity such that the cavity serves both as the resonant structure for microwave generation and as the chamber for plasma formation, eliminating the need for separate external microwave hardware and reducing overall system complexity

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The resonant cavity structure performs multiple functions simultaneously: it acts as the resonant structure for microwave amplification, contains the plasma discharge, and provides the interaction space between the magnetron and plasma. This multi-functionality reduces the number of separate components needed in the system

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If a multi-component microwave power subsystem configuration is used, then microwave-induced plasma can be generated, but the system size and cost increase

Engineering Contradiction:
Improveplasma generation capabilityVSAvoidsystem volume
Core Design Contradiction:
ReliabilityVSVolume of moving object

Solution Approach 1:

The patent merges the microwave power source, resonant structure, and plasma chamber into a single compact integrated device, eliminating the need for external microwave hardware and reducing overall system volume

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The magnetron is positioned within the resonant cavity structure, with the cathode and anode arranged such that the interaction space is nested within the cavity volume. The plasma torch is positioned to utilize the same spatial envelope, creating a compact nested configuration that minimizes system footprint

Inventive Principle:
Principle #7Nested doll (Nesting)

3Power

If conventional resonant structures are used, then microwave power can be delivered, but electromagnetic field pattern mismatch compromises plasma symmetry and stability

Engineering Contradiction:
Improvemicrowave power deliveryVSAvoidplasma symmetry
Core Design Contradiction:
PowerVSStability of the object's composition

Solution Approach 1:

The patent modifies the resonant cavity structure to create specific local field conditions. The cavity is designed with particular geometric features and the magnetron is positioned at specific locations within the cavity to generate electromagnetic field patterns that produce symmetric cylindrical or toroidal plasma discharges, rather than using conventional uniform resonant structures

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent replaces conventional mechanical field coupling methods with direct electromagnetic field interaction. The magnetron electrons directly interact with the resonant electromagnetic fields within the cavity to generate plasma, eliminating the need for separate field transformation components and achieving better field-pattern matching

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces size, cost, and complexity, enabling efficient and stable microwave-induced plasma generation with improved symmetry and auto-stabilization, suitable for portable and cost-effective spectroscopy and plasma processing applications.

Implementation Method 1

microwave radiation in the range of several GHz (as opposed to RF radiation) is often better suited for energizing nitrogen plasmas

Methodology Applied
Scientific EffectMicrowave radiation: Microwave Radiation

Implementation Method 2

The microwave radiation ionizes the gas into plasma

Methodology Applied
Scientific EffectIonization: Ionisation

Implementation Method 3

a microwave energy source comprising a cathode on a cathode axis, and an anode spaced from the cathode by an interaction space

Methodology Applied
Scientific EffectThermionic emission: Thermionic Emission

Data Source

PatentUS9427821B2Integrated magnetron plasma torch, and related methods
Publication Date: 2016.08.30 AGILENT TECHNOLOGIES INC
  • US9427821B2 patent drawing
  • US9427821B2 patent drawing
  • US9427821B2 patent drawing

AI summary

A plasma source for generating microwave-induced plasma includes a plasma torch integrated with a microwave energy source. The torch establishes a gas flow path from one side of the plasma source to the other side. The torch may be integrated with the microwave energy source such that a plasma-forming gas flowing through the torch is subjected to microwave radiation, which serves to initiate and/or sustain plasma in the torch. The plasma may be ejected from the torch and utilized in various applications involving the use of plasma, including analytical techniques such as optical emission spectrometry and mass spectrometry.