Integrated Manifold Assembly for Independent Multi-Valve Flow Control
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Solution Overview
Problem
Existing fluid systems with multiple valves require extensive assembly and numerous fluid connections, leading to increased size and complexity, particularly in applications like gas distribution for semiconductor wafer manufacturing, where compact and efficient control of fluid flow is essential.
Innovation Solution
A compact integrated actuator manifold system that houses multiple valve actuating mechanisms within a single housing block, featuring internal passages for actuating fluid supply and integrated porting, reducing the need for additional fluid connections and seals, and allowing for independent actuation of valve segments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple valves are arranged in separate assemblies, then each valve can be independently controlled, but the overall system size and complexity increase
Solution Approach 1:
The patent combines multiple valve assemblies into a single integrated manifold structure where multiple valve bodies are housed within one common manifold. This merging reduces the number of separate assemblies while maintaining independent control of each valve through individual actuators, thereby reducing overall system complexity while preserving adaptability.
Solution Approach 2:
The manifold structure serves multiple functions simultaneously: it houses multiple valve bodies, provides common fluid distribution pathways, supports multiple actuators, and enables independent control of each valve. This multi-functionality allows the single manifold assembly to replace what would otherwise require multiple separate assemblies.
2Adaptability or versatility
If multiple valves are arranged in separate assemblies, then each valve can be independently controlled, but the number of fluid connections and seals increases
Solution Approach 1:
By merging multiple valve assemblies into a single manifold, the patent reduces the total number of external fluid connections and seals required. The common manifold structure provides internal fluid pathways that connect to multiple valve bodies without requiring separate external connections for each valve, thereby reducing potential leak points and improving reliability.
3Volume of stationary object
If a compact manifold design is used, then assembly size is reduced, but manufacturing complexity increases
Solution Approach 1:
The manifold is designed as a segmented structure with multiple valve bodies housed within a common manifold. This segmentation allows each valve assembly to be manufactured and tested independently before final integration, reducing the complexity of manufacturing the entire compact assembly as a single monolithic piece while still achieving space savings through the integrated design.
Data Source
AI summary
A fluid distribution system includes a mass flow controller and a first manifold assembly. The mass flow controller includes first and second end ports each extending from a lower end of the mass flow controller, proximate corresponding first and second sides of the mass flow controller, for lateral flow through the mass flow controller from the first end port to the second end port. The first manifold assembly includes a first end connection coupled to the first end port of the mass flow controller. The first manifold assembly includes a first manifold body extending parallel to the first side of the mass flow controller, and a plurality of first valve subassemblies retained in the first manifold body and arranged across a plane extending substantially parallel to the first side of the mass flow controller, with valve movement perpendicular to the first side of the mass flow controller.