Integrated Manifold Assembly for Precise Multi-Fluid Flow Control

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Solution Overview

Problem

Semiconductor fabrication processes require advanced mass flow control systems that can handle a wider range of fluids, provide increased accuracy and repeatability, and are compact and cost-effective, yet existing technologies struggle to meet these demands efficiently.

Innovation Solution

The development of a system comprising fluid supply apparatuses with inlet, outlet, and bleed ports, mounted on substrates with vacuum and outlet ports, connected to vacuum and outlet manifolds, allowing for precise control and delivery of process fluids through a network of channels and valves, enabling rapid assembly and maintenance with standardized manifold configurations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If multiple separate fluid control systems are used to handle different process fluids, then flow control accuracy is improved, but device complexity and space requirements increase

Engineering Contradiction:

Improveflow control accuracyVSAvoidsystem complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent combines multiple fluid control systems into a single integrated manifold assembly that can handle multiple process fluids simultaneously. The manifold features multiple inlet ports for different fluids and a common outlet port, allowing consolidation of previously separate control systems into one unified device, thereby reducing overall system complexity while maintaining flow control accuracy

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The manifold assembly is designed with multi-functionality to handle various process fluids through a single device. By incorporating multiple inlet ports configured for different fluids and a shared outlet port with flow control mechanisms, the system achieves universal fluid handling capability, eliminating the need for multiple dedicated control systems

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Measurement precision

If multiple separate fluid control systems are used to handle different process fluids, then flow control accuracy is improved, but installation space increases

Engineering Contradiction:

Improveflow control accuracyVSAvoidinstallation space

Core Design Contradiction:

Measurement precisionVSArea of stationary object

Solution Approach 1:

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Device complexity

If traditional manifold configurations are used, then system simplicity is maintained, but assembly and maintenance time increases

Engineering Contradiction:

Improvesystem simplicityVSAvoidassembly and maintenance time

Core Design Contradiction:

Device complexityVSLoss of time

Solution Approach 1:

The manifold assembly is designed as a modular, segmented structure with distinct inlet ports, internal channels, and outlet ports that can be independently accessed. This segmentation allows for rapid assembly by connecting pre-fabricated sections and facilitates quick maintenance by isolating specific components without disassembling the entire system

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The manifold is pre-configured with optimized internal channel geometries and flow control features during manufacturing. Flow paths are pre-designed to minimize resistance and ensure uniform distribution, eliminating the need for time-consuming field adjustments or complex assembly procedures

Inventive Principle:

Principle #10Preliminary action

4Adaptability or versatility

If advanced flow control features are added to handle more process fluids, then versatility is improved, but device complexity increases

Engineering Contradiction:

Improvefluid handling capabilityVSAvoidapparatus complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

Inventive Principle:

Principle #5Merging (Combining)

Data Source

PatentUS11899477B2Fluid flow control system comprising a manifold assembly

Publication Date: 2024.02.13 ICHOR SYSTEMS INC

AI summary

Systems for processing articles are essential for semiconductor fabrication. In one embodiment, a system is disclosed comprising a plurality of fluid supplies configured to supply process fluids, a plurality of apparatuses for controlling flow, a plurality of mounting substrates, a vacuum manifold fluidly coupled to the plurality of mounting substrates, an outlet manifold fluidly coupled to the plurality of mounting substrates, a vacuum source fluidly coupled to the vacuum manifold, and a processing chamber fluidly coupled to the outlet manifold. The plurality of apparatuses for controlling flow have a bleed port and an outlet. The outlets of the plurality of apparatuses are fluidly coupled to corresponding outlet ports of the plurality of mounting substrates. The bleed ports of the plurality of apparatuses are fluidly coupled to the corresponding vacuum ports of the plurality of mounting substrates.