Integrated Mirror-Lens Reflective Objective Lens for High-NA Observation
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Solution Overview
Problem
Existing reflective objective lenses face challenges in manufacturing precision due to the need for precise adjustment of multiple elements and formation of non-planar surfaces, especially when achieving high numerical apertures, and difficulties in filling liquid immersion media.
Innovation Solution
A reflective objective lens design with a simplified structure comprising two elements, each with specific surfaces, allowing for easier assembly and manufacturing precision, and utilizing a liquid immersion medium with matching refractive indices to reduce aberrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a plano-convex lens is added to the objective lens system, then chromatic aberration on the axis is eliminated, but the adjustment of multiple elements becomes difficult and manufacturing precision deteriorates
Solution Approach 1:
The patent merges the plano-convex lens with the concave mirror by forming the plano-convex lens shape on the back surface of the concave mirror, creating a single integrated element. This eliminates the need for separate adjustment of multiple elements while maintaining the chromatic aberration correction function. The concave mirror portion and plano-convex lens portion are formed as one piece, reducing assembly complexity.
Solution Approach 2:
The patent segments the single element into functional portions: a concave mirror portion for reflecting light and a plano-convex lens portion for refracting light. This segmentation allows each portion to perform its specific function while being manufactured as a single integrated component, avoiding the adjustment problems of separate elements.
2Device complexity
If three non-planar surfaces are formed in one fused silica element, then adjustment of multiple elements is eliminated, but the manufacturing precision of non-planar surfaces becomes difficult to achieve
Solution Approach 1:
The patent combines the plano-convex lens function with the concave mirror, reducing the number of separate non-planar surfaces that need to be manufactured. Instead of forming three separate non-planar surfaces in one element, the integrated design requires only the concave mirror surface and the plano-convex lens surface, simplifying the manufacturing process while maintaining optical performance.
3Reliability
If a recessed exit spherical surface is used, then chromatic aberration is eliminated, but the space filling with liquid immersion medium becomes difficult
Solution Approach 1:
The patent merges the plano-convex lens with the concave mirror, creating an integrated element where the light incident plane and exit spherical surface are formed on the same element. This eliminates the need for separate recessed surfaces and simplifies the filling process for liquid immersion medium, as the integrated structure provides a more straightforward interface for medium insertion.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enables high numerical aperture observation with reduced manufacturing errors and improved field of view, facilitating high-resolution microscopy.
Implementation Method 1
a reflective objective lens that collect light by a reflecting mirror
Implementation Method 2
light traveling toward the focal point on the optical axis perpendicularly enters the spherical surface of the additional plano-convex lens, chromatic aberration on the axis does not occur
Implementation Method 3
uses a fused silica that transmits deep ultraviolet rays as the material for the plano-convex lens and the cover glass and fills the space between the plano-convex lens and the cover glass with glycerin having a refractive index similar to that of the fused silica
Data Source
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AI summary
An objective lens according to an aspect of the present disclosure includes a first element (11) having a first surface (S1) to a fourth surface (S4) and a second element (12) having a first planar surface (S4') and a second planar surface (S5) and being located on the specimen-side of the first element (11). The first surface (S1) is a transmissive planar surface located on the optical axis (OX), the second surface (S2) is a reflective convex surface located on the optical axis, the third surface (S3) is a reflective concave surface located on the outer side of the first surface (S1), and the fourth surface (S4) is a transmissive planar surface located on the outer side of the second surface (S2). The first planar surface (S4') is a transmissive planar surface to be joined to the fourth surface (S4) and the second planar surface (S5) is a transmissive planar surface parallel to the first planar surface (S4').