Integrated Optical Member for Interference Imaging
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Solution Overview
Problem
Conventional interference image imaging apparatuses require multiple optical components, including half mirrors, phase shifters, and deflectors, leading to increased size and complexity, as well as light loss and directional dependency in defect detection.
Innovation Solution
The apparatus incorporates an optical member with integrated first and second portions that transmit and phase-shift light, eliminating the need for separate half mirrors and deflectors, and utilizing a rotation mechanism to adjust the relative angle between light bundles, thereby reducing component count and size while minimizing light loss and directional dependency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If multiple optical components (half mirrors, phase shifters, deflectors) are used to separate and interfere light bundles, then the interference imaging function is achieved, but the number of components increases and apparatus size grows
Solution Approach 1:
The patent combines multiple optical components (half mirror for separation, phase shifter, deflector, and half mirror for interference) into a single integrated optical member. This optical member includes a first portion that separates light into first and second bundles, a second portion that phases the second bundle relative to the first, and a third portion that deflects the first bundle, with all portions integrated in one component that also performs the interference function.
Solution Approach 2:
The integrated optical member performs multiple functions simultaneously: it separates light bundles, introduces phase shifts, deflects light paths, and enables interference. By making the optical member multi-functional, the patent eliminates the need for separate dedicated components for each function, thereby reducing overall device complexity while maintaining the complete interference imaging capability.
2Volume of stationary object
If multiple optical components are provided separately, then the interference function is achieved, but the apparatus size increases
Solution Approach 1:
The patent merges multiple separate optical components into a single integrated optical member, significantly reducing the physical space required. The integrated structure eliminates gaps and mounting spaces between separate components, thereby compacting the overall apparatus while preserving all necessary optical functions.
Solution Approach 2:
The optical member is designed with nested functional portions where the first, second, and third portions are integrated within a single component structure. This nesting arrangement allows multiple optical functions to occupy the same spatial envelope, effectively reducing the apparatus volume compared to separate components arranged in sequence.
3Loss of energy
If separate optical members are used for light separation and interference, then the imaging function is achieved, but light loss occurs
Solution Approach 1:
By integrating all optical functions into a single member, the patent eliminates multiple light transmission interfaces between separate components. Each interface in a multi-component system causes light loss through reflection and absorption; the integrated structure reduces these interfaces, thereby minimizing overall light loss while maintaining the complete optical path required for interference imaging.
4Measurement precision
If conventional optical members are used, then light separation is achieved, but directional dependency in defect detection increases
Solution Approach 1:
The patent introduces a rotation mechanism that can rotate the integrated optical member around the optical axis. This dynamic capability allows the system to adjust the relative angles between light bundles and modify the interference pattern, thereby reducing directional dependency in defect detection. The rotation mechanism enables the system to compensate for angular variations and maintain consistent detection sensitivity across different orientations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces the number of components, suppresses apparatus size growth, and enhances defect detection sensitivity by minimizing light loss and directional dependency.
Implementation Method 1
an optical member configured to transmit the irradiation light reflected from or transmitted through mutually different points or regions of the object in a state of being separated into a first bundle of rays and a second bundle of rays
Implementation Method 2
the first optical member and the second optical member are configured to transmit the second bundle of rays to change a phase of the second bundle of rays
Implementation Method 3
the rotation mechanism is configured to change a relative angle between the first bundle of rays and the second bundle of rays by rotating at least one of the first optical member and the third optical member
Implementation Method 4
an optical member configured to transmit the irradiation light reflected from or transmitted through mutually different points or regions of the object in a state of being separated into a first bundle of rays and a second bundle of rays and interfere the transmitted first bundle of rays and the transmitted second bundle of rays with each other
Data Source
AI summary
This interference image imaging apparatus includes a first optical member (21) and a second optical member (22), and has a first portion (8) for transmitting a first bundle of rays (7) to change a direction of outgoing light with respect to incident light, and a second portion (10) for changing a phase of second bundle of rays (9) with respect to the first bundle of rays (7).