Integrated Orifice Valve Structure for Transient Flow Reduction
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Solution Overview
Problem
Existing valves in semiconductor applications experience transient flow conditions due to the volume between the orifice and the shutoff valve, which affects the precision and speed of fluid delivery.
Innovation Solution
Incorporating an orifice restriction adjacent to the valve seat to minimize the fluid volume between the valve seat and the orifice, thereby reducing the duration of transient flow conditions when the shutoff valve changes state.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an orifice restriction is integrated adjacent to the valve seat, then transient flow conditions are minimized and fluid delivery precision is improved, but device complexity increases
Solution Approach 1:
The orifice restriction is merged with the valve body structure, where the orifice carrier is integrated into the valve cavity and the orifice disc is positioned within the flow path adjacent to the valve seat. This integration eliminates the need for separate orifice components while achieving precise fluid delivery control by minimizing the volume between the orifice and valve seat.
2Loss of time
If the fluid volume between the valve seat and orifice is minimized, then the duration of transient flow conditions is reduced and control speed is improved, but manufacturing complexity increases
Solution Approach 1:
The valve body is segmented into functional zones: the valve cavity, the orifice carrier section, and the flow path. The orifice carrier is positioned to create a minimized fluid volume chamber between the orifice disc and valve seat, allowing precise control of transient flow conditions while maintaining manufacturable dimensions and assembly steps.
3Speed
If an orifice carrier and orifice disc are integrated into the valve body, then rapid precise control of fluid flow is achieved, but the number of components and assembly steps increases
Solution Approach 1:
The orifice carrier and orifice disc are merged into the valve body structure, where the orifice carrier forms part of the valve cavity and the orifice disc is integrated into the flow path. This merging reduces the number of discrete components while enabling rapid fluid flow control by minimizing the volume between the orifice and valve seat, allowing faster response during valve state changes.
Data Source
AI summary
A valve includes a valve body having first and second fluid ports extending to a valve cavity, a seat carrier subassembly installed in the valve cavity and including a seat carrier body with a first annular inner wall defining a first flow aperture aligned with the first fluid port and a valve seat disposed in an annular recess surrounding the first annular inner wall, and a second annular inner wall defining a second flow aperture aligned with the second fluid port. A valve element is disposed within the valve cavity and is movable between a closed position sealing against the valve seat and an open position permitting fluid flow across the valve seat between the first and second flow apertures. An outer periphery of an orifice restriction is seated against an interior portion of one of the first annular inner wall and the second annular inner wall.