Integrated Pressure Humidity Sensor with Shared Circuitry
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Solution Overview
Problem
Existing sensors for environmental parameters like pressure and humidity often require separate installations, leading to increased physical space, duplicated components, and higher costs due to the need for distinct sensing structures and calibration processes.
Innovation Solution
A combination sensor integrating pressure and humidity sensors on a single integrated circuit die, utilizing piezo resistive transducers in a Wheatstone bridge configuration, with shared circuitry and a vent opening to offset pressure effects on the humidity sensor, allowing for simultaneous and accurate measurement of both parameters.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If separate pressure and humidity sensors are used, then each sensor can be optimized for its specific function, but the device occupies more physical space and requires duplicate components
Solution Approach 1:
The patent combines pressure and humidity sensing functions into a single integrated sensor device. The sensing element includes both a pressure-sensitive component and a humidity-sensitive component that share common structural elements, allowing both parameters to be measured in one compact unit rather than requiring separate sensor installations.
Solution Approach 2:
The sensing element is designed to perform multiple functions simultaneously - it can measure both pressure and humidity using the same basic structure. The piezoresistive transducer serves dual purposes by detecting both pressure-induced resistance changes and humidity-induced resistance changes, eliminating the need for completely separate sensing systems.
2Measurement precision
If separate pressure and humidity sensors are installed, then each sensor can be independently calibrated, but the overall system cost and component count increase
Solution Approach 1:
The patent integrates pressure and humidity sensing capabilities into a single sensor assembly with shared components. The output circuit processes signals from both sensing functions through a unified interface, reducing the total number of discrete components while maintaining independent calibration capability for each parameter through separate signal processing paths.
3Measurement precision
If separate sensing structures are used for pressure and humidity, then each sensor can be optimized for its specific measurement, but manufacturing costs and assembly complexity increase
Solution Approach 1:
The patent employs a single sensing element that integrates both pressure and humidity sensing functions. This unified structure is manufactured as one component rather than assembling separate sensors, reducing manufacturing steps and assembly complexity while maintaining the ability to optimize each sensing function through dedicated signal processing circuits.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces physical space, eliminates duplicate components, and achieves accurate multi-parameter sensing with potential cost savings by integrating sensors and using shared circuitry, while maintaining precision in environmental parameter measurements.
Implementation Method 1
pressure sensor utilizing piezo resistive transducers
Implementation Method 2
humidity sensor utilizing piezo resistive transducers
Implementation Method 3
piezo resistive transducers in a Wheatstone bridge configuration
Implementation Method 4
vent opening to offset pressure effects on the humidity sensor
Data Source
AI summary
A combination sensor and corresponding method of measuring a plurality of environmental parameters uses a pressure sensor disposed on an integrated circuit die; a humidity sensor disposed on the integrated circuit die; and a circuit coupled to and shared by the pressure sensor and the humidity sensor to facilitate pressure and humidity sensing.


