Integrated Probe Blades for Small-Pad Kelvin Testing
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Solution Overview
Problem
Conventional probes struggle to form accurate Kelvin connections with increasingly smaller contact pads on integrated circuit devices due to size constraints, leading to higher costs and difficulty in contacting separate force and sense probes.
Innovation Solution
The development of probe blades with a dielectric blade body and integrated electrically conductive traces, along with blade holders that facilitate a Kelvin electrical connection, allowing for separate force and sense signals through a single contact pad.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If separate force and sense probes are used to contact a single contact pad, then Kelvin electrical connection is achieved, but the contact pad size must be large enough to accommodate separate probe contacts
Solution Approach 1:
The patent merges the force probe and sense probe into a single integrated probe structure that contacts the contact pad at the same location. The force probe applies mechanical contact while the sense probe simultaneously measures voltage at the same contact point, enabling Kelvin connection without requiring separate contact locations. This resolves the contradiction by combining multiple measurement functions into a single contact interaction, allowing accurate Kelvin measurement on small contact pads.
Solution Approach 2:
The patent transitions from a planar arrangement where separate probes would need to contact different locations on the contact pad surface, to a three-dimensional configuration where the force and sense probes operate at different heights and positions relative to each other while both contacting the same contact pad. The force probe extends downward to apply contact force while the sense probe is positioned to measure voltage, creating a vertical separation that eliminates the need for separate horizontal contact locations.
2Measurement precision
If conventional probes are designed to form Kelvin connection on smaller contact pads, then measurement precision improves, but manufacturing cost increases
Solution Approach 1:
The patent segments the probe into distinct functional components: a force probe portion for applying contact force, a sense probe portion for voltage measurement, and a shared contact pad interface. This segmentation allows each component to be optimized independently and manufactured using standard processes, reducing overall manufacturing complexity and cost while maintaining Kelvin connection capability on small contact pads.
Solution Approach 2:
The integrated probe structure serves multiple functions simultaneously: it applies mechanical contact force, measures voltage, and establishes Kelvin connection all through a single contact interaction with the small contact pad. This multi-functionality eliminates the need for separate force and sense probe assemblies, reducing part count, assembly complexity, and manufacturing cost while achieving the same measurement precision.
3Reliability
If separate force and sense probes contact a contact pad, then independent verification of current flow and voltage is provided, but the complexity of the probe system increases
Solution Approach 1:
The patent combines the force probe and sense probe into a single integrated probe assembly that maintains independent verification capability. The force probe portion applies contact force while the sense probe portion simultaneously measures voltage at the same contact location, providing independent verification of current flow and voltage without requiring separate probe systems. This merging reduces system complexity while preserving measurement reliability.
Solution Approach 2:
The integrated probe structure acts as an intermediary that simultaneously performs force application and voltage measurement functions. The probe design allows the force and sense measurements to be decoupled in terms of their physical implementation (separate probe portions) while being coupled in their operational execution (simultaneous contact with single contact pad), providing independent verification through a unified measurement system.
Data Source
AI summary
Probes, probe blades, tools for probe blades, blade holders, and probe systems for electrically testing a device under test (DUT). In some examples, the probe blades are configured to provide a Kelvin electrical connection with the DUT. In some examples, the probe blades include an alignment structure configured to engage with a blade holder when the probe blade is received within a blade-receiving region of the blade holder. The blade holders are configured to separably and operatively attach a probe blade to a probe system. In some examples, the blade holders include the probe blade. The probe systems are configured to electrically test the DUT and include the blade holder.