Integrated Probe Head for Simultaneous Electrical and Optical Inspection
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Solution Overview
Problem
Existing connecting devices for inspecting optoelectronic devices require significant time for alignment and are inefficient in performing simultaneous electrical and optical measurements due to independent positioning of electric and optical contacts.
Innovation Solution
A connecting device with a probe head that integrates electric and optical contacts, where the tip ends of both types are exposed on the lower surface and the electric contact's proximal end is on the upper surface, along with a transformer that allows the optical contact to penetrate, facilitating simultaneous alignment and measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If electric contacts and optical contacts are positioned independently, then each contact can be optimized for its specific function, but the alignment time with the optoelectronic device increases significantly
Solution Approach 1:
The patent combines electric contacts and optical contacts into a single integrated probe unit. The probe head holds both types of contacts in fixed relative positions, allowing simultaneous alignment with corresponding terminals on the optoelectronic device. This eliminates the need for separate alignment operations and significantly reduces alignment time while maintaining measurement precision.
Solution Approach 2:
The relative positional relationship between electric contacts and optical contacts is predetermined during probe manufacturing. The probe head is designed with pre-established geometric relationships between contact positions, so that when the probe is aligned with the device, both electric and optical connections are established simultaneously without requiring sequential adjustment.
2Reliability
If electric contacts and optical contacts are positioned independently, then each contact type can be optimized separately, but the complexity of the connecting device increases
Solution Approach 1:
The patent integrates multiple contact types into a single probe assembly with a unified structure. The probe head contains both electric contacts and optical contacts arranged in predetermined positions, reducing the number of separate components and assemblies needed. This integration simplifies the overall device structure while maintaining the reliability of each contact type through optimized individual designs.
3Productivity
If electric contacts and optical contacts are positioned independently, then each contact can be optimized for its function, but the ability to perform simultaneous electrical and optical measurements is compromised
Solution Approach 1:
The integrated probe unit enables simultaneous electrical and optical measurements by holding both contact types in fixed relative positions. When the probe is aligned with the optoelectronic device, both electric and optical connections are established at the same time, allowing concurrent measurements without requiring separate positioning operations, thereby improving measurement efficiency while maintaining positioning precision.
Data Source
AI summary
A connecting device for inspection includes a probe head configured to hold electric contacts and optical contacts such that tip ends of the respective contacts are exposed on a lower surface of the probe head while proximal ends of the electric contacts are exposed on an upper surface of the probe head and the optical contacts are fixed to the probe head, and a transformer including connecting wires provided therein such that tip ends on one side of the connecting wires electrically connected to the proximal ends of the electric contacts exposed on the upper surface of the probe head are arranged in a lower surface of the transformer while the optical contacts slidably penetrate the transformer. A positional relationship between the tip end of the respective electric contacts and the tip end of the respective optical contacts on the lower surface of the probe head corresponds to a positional relationship between an electrical signal terminal and an optical signal terminal of a semiconductor device. The optical contacts continuously penetrate the probe head and the transformer.