Integrated Quartz Oscillator on Active Substrate

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Solution Overview

Problem

Existing quartz oscillators face challenges in achieving high frequencies above 100 MHz due to thickness limitations, leading to increased susceptibility to stray capacitances and vibration sensitivity, which complicates their manufacturing and performance in GPS, radio, and radar systems.

Innovation Solution

Integrating quartz resonators directly with active electronics on a wafer using low-temperature bonding, allowing for miniaturization and reduced parasitic capacitances, thereby enhancing frequency capabilities and stability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If quartz resonators are made thin to achieve frequencies above 100 MHz, then frequency capability is improved, but mechanical strength deteriorates causing breakage during handling and mounting

Engineering Contradiction:
Improvefrequency capabilityVSAvoidmechanical strength
Core Design Contradiction:
SpeedVSStrength

Solution Approach 1:

The resonator is segmented from the bulk quartz substrate through precision dicing, creating thin individual resonator elements that can be handled and mounted without breaking while maintaining high frequency capability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A handle wafer serves as an intermediary carrier during the fabrication and handling process, providing mechanical support to thin resonators to prevent breakage, and is subsequently removed after mounting

Inventive Principle:
Principle #24Intermediary (Mediator)

2Speed

If resonator dimensions are reduced for UHF operation, then frequency capability is improved, but susceptibility to stray capacitances increases

Engineering Contradiction:
Improvefrequency capabilityVSAvoidsusceptibility to stray capacitances
Core Design Contradiction:
SpeedVSObject-affected harmful factors

Solution Approach 1:

The resonator is merged with active electronic circuitry on the same substrate, creating an integrated oscillator module where the electronics provide shielding and compensation that reduces the impact of stray capacitances on the small resonator

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The packaging and mounting geometry are optimized to minimize parasitic capacitance contributions from external structures, and the resonator is positioned close to the active circuitry to reduce coupling with stray capacitive elements

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If hybrid mounting techniques with ceramic packages are used, then ease of manufacture is improved, but device size and power consumption increase

Engineering Contradiction:
ImprovemanufacturabilityVSAvoiddevice size
Core Design Contradiction:
Ease of manufactureVSVolume of moving object

Solution Approach 1:

Multiple functions (resonator, electronics, packaging) are merged into a single integrated structure where the resonator is directly mounted on the circuit substrate, eliminating the need for separate ceramic packages and reducing overall device size

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The substrate serves multiple functions: it provides mechanical support, electrical connections, and thermal management, replacing the need for separate ceramic package components

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the construction of small, low-power, high-performance oscillators with reduced stray signals and fast warm-up times, offering improved vibration sensitivity and phase noise performance.

Implementation Method 1

a quartz resonator (20) is bonded directly to a wafer (30) with active electronics (40) to form a small, low power, and low phase noise oscillator

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 2

quartz-base oscillators are constructed using hybrid techniques

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS7830074B2Integrated quartz oscillator on an active electronic substrate
Publication Date: 2010.11.09 HRL LAB
  • US7830074B2 patent drawing
  • US7830074B2 patent drawing
  • US7830074B2 patent drawing

AI summary

An oscillator having a quartz resonator, and a base wafer containing active electronics, wherein the quartz resonator is bonded directly to the base wafer and subsequently hermetically capped.