Integrated RF Generator Combining Low and High Frequencies

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Solution Overview

Problem

Plasma tools used in PECVD reactors require multiple RF generators and matchboxes to produce modulated frequencies, leading to increased cost, real-estate usage, complexity, and decreased reliability due to the number of components and connections.

Innovation Solution

A single RF generator combines low and high frequencies using a combiner, which then amplifies the combined signal, reducing the number of generators and matchboxes, and simplifying the system by packaging components in a single generator box.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple RF generators and matchboxes are used to generate modulated frequencies, then plasma density and plasma energy can be controlled separately, but the system complexity, cost, and real-estate usage increase while reliability decreases

Engineering Contradiction:

Improveseparate control of plasma density and plasma energyVSAvoidnumber of generators and matchboxes

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent combines multiple RF generators and matchboxes into a single integrated RF generator that produces both low frequency and high frequency signals internally. The system merges the functions of separate low frequency generator, high frequency generator, and matchboxes into one unified device, reducing component count while maintaining the capability to separately control plasma density and energy through the combiner circuitry.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The single RF generator is designed to perform multiple functions: generating low frequency signals, generating high frequency signals, combining these signals through a combiner, and providing impedance matching all within one device. This multi-functional approach replaces the need for separate specialized components while achieving the same plasma processing objectives.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If multiple generators and matchboxes are used, then frequency control flexibility is improved, but the number of components and connections increases leading to decreased reliability

Engineering Contradiction:

Improvefrequency control flexibilityVSAvoidsystem reliability

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

By merging multiple independent components into a single integrated RF generator, the system reduces the number of potential failure points. The integrated design eliminates numerous external connections and interfaces between separate generators and matchboxes, thereby improving overall system reliability while preserving frequency control flexibility through internal signal combining.

Inventive Principle:

Principle #5Merging (Combining)

3Adaptability or versatility

If two separate generators operating at different frequencies are used, then plasma processing control is improved, but cost and real-estate usage increase

Engineering Contradiction:

Improveplasma processing controlVSAvoidnumber of generators and matchboxes

Core Design Contradiction:

Adaptability or versatilityVSQuantity of substance

Solution Approach 1:

The patent integrates the functionality of two separate frequency generators and their associated matchboxes into a single RF generator unit. This consolidation reduces the quantity of hardware components by approximately 50% while maintaining the dual-frequency capability necessary for precise plasma processing control.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The system employs a nested structure where the low frequency and high frequency signal generation pathways are integrated within a single generator housing. The combiner circuitry is nested within the same unit, allowing multiple functional subsystems to be contained within one compact device, thereby reducing real-estate usage and component quantity.

Inventive Principle:

Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces the number of components by approximately 50%, decreases cost and complexity, and increases reliability by about 100% compared to traditional systems, while also reducing metrology needs and power consumption.

Implementation Method 1

a combiner that combines the frequencies

Methodology Applied

Scientific EffectSignal combination:

Implementation Method 2

a power amplifier that amplifies the combined signal

Methodology Applied

Scientific EffectSignal amplification:

Implementation Method 3

an impedance matching circuit

Methodology Applied

Scientific EffectImpedance matching:

Data Source

PatentUS10665427B2RF generator for generating a modulated frequency or an inter-modulated frequency

Publication Date: 2020.05.26 LAM RES CORP

AI summary

A high frequency radio frequency (RF) generator that generates a high frequency RF signal is described. There is no need for another low frequency RF generator that generates a low frequency RF signal. A low frequency RF signal is pre-amplified within the high frequency RF generator to output a pre-amplified low frequency RF signal. Similarly, a high frequency RF signal is pre-amplified within the high frequency RF generator to output a pre-amplified high frequency RF signal. The high frequency RF generator combines the pre-amplified low frequency RF with the pre-amplified high frequency RF signal to provide a combined RF signal. The combined RF signal is amplified within the high frequency RF generator to supply an amplified signal to a match. There is also no need for another match for the low frequency RF generator.