Integrated Semiconductor Test Device Sharing AC DC Circuits
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Solution Overview
Problem
Current semiconductor test methods require multiple independent testers for AC parametric, DC parametric, and thermal resistance tests, leading to increased equipment costs, reduced testing efficiency, and complex handling procedures due to the need for different test circuits and contact devices.
Innovation Solution
A semiconductor test device and method that integrates AC, DC, and thermal resistance tests using a single device, with a holding unit, test units, and a connection unit that switches between test units to share components and measurement circuits, reducing the number of test contact devices and equipment costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple independent testers are used for AC parametric, DC parametric, and thermal resistance tests, then testing coverage and reliability are improved, but equipment costs and device complexity increase
Solution Approach 1:
The patent combines multiple independent testers (AC parametric tester, DC parametric tester, thermal resistance tester) into a single integrated tester. The device includes a control unit that coordinates different test circuits and a contact device with multiple contact elements that can be selectively connected to perform various tests, thereby reducing equipment complexity while maintaining comprehensive testing coverage
Solution Approach 2:
The integrated tester employs a universal contact device with multiple contact elements (first through fourth contact elements) that can serve different test functions. The control unit selectively activates appropriate test circuits based on the required test type, enabling a single device to perform AC parametric tests, DC parametric tests, and thermal resistance tests, thus achieving multi-functionality
2Measurement precision
If multiple independent testers are used for different test types, then testing accuracy is maintained, but personnel costs and handling complexity increase
Solution Approach 1:
The patent merges multiple testers into one integrated system with a unified control unit that manages all test operations. The contact device integrates multiple contact elements that can be automatically positioned and connected, reducing the need for manual handling and switching between different testers, thereby simplifying operations while preserving measurement precision through dedicated test circuits for each test type
3Reliability
If multiple testers are used for sequential testing, then comprehensive test coverage is achieved, but testing time and productivity are reduced
Solution Approach 1:
The integrated tester enables continuous testing by eliminating the need to physically move or reconfigure the device under test between different testers. The control unit coordinates sequential execution of AC parametric tests, DC parametric tests, and thermal resistance tests through a single integrated system with automated contact switching, maintaining continuous operation and improving testing efficiency while achieving comprehensive test coverage
Data Source
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AI summary
To enable a reduction in the quantity of test contact devices, reduce equipment costs by enabling a sharing of tester components and measurement circuits, and enable an improvement of AC test conditions (waveform). In an integrated test device, an AC tester and DC tester are provided, and a DUT mounting base and AC test circuit unit are disposed sandwiching an intermediate electrode plate so as to be able to rise and descend in a vertical direction. The intermediate electrode plate is fixed with support plates, the DUT mounting base is below the intermediate electrode plate, and by an IGBT module being held in a predetermined position with external terminals thereof in an upward facing condition, and being raised and lowered by a cylinder, each of the external terminals takes on a condition wherein it is connected or not connected to the intermediate electrode plate. A DC parameter, AC parameter, and thermal resistance test are carried out, switching among the tests, with one contact device providing a movable portion that comes into contact with each of the AC tester and DC tester on an electrode portion on the intermediate electrode plate.