Integrated Shape Measurement System for Optical Components
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Solution Overview
Problem
Current measurement systems for optical components, such as exposure masks and imprint molds, face challenges in achieving high accuracy and reliability due to inconsistencies in shape measurement values and increased error ranges when specifications approach measurement limits, affecting the productivity and reliability of microelectrical machine systems and semiconductor devices.
Innovation Solution
A measurement system comprising an external storage unit for shape factor tolerances, a measuring tool for data collection, and a processing unit with comparison, verification, and calculation modules to determine the shape of the object within specified tolerances, ensuring geometric consistency and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple different measurement systems are used to measure individual shape factors (dimensions, angles, flatness), then comprehensive shape measurement is achieved, but inconsistency between measurement values increases and reliability decreases
Solution Approach 1:
The patent combines multiple measurement systems into a single integrated measurement system that can measure multiple shape factors (dimensions, angles, flatness) simultaneously. This unification ensures that all measurements are taken under consistent conditions using the same reference coordinate system, thereby eliminating inconsistencies between different measurement systems while maintaining comprehensive shape measurement capability.
Solution Approach 2:
The measurement system is designed with multi-functionality to measure various shape factors including dimensions, angles, and flatness using a single system. This universal measurement approach allows the system to perform multiple measurement tasks consistently, ensuring reliability and consistency across all shape factor measurements without requiring separate specialized systems.
2Manufacturing precision
If individual shape factors are measured separately by different measurement systems, then various shape parameters can be obtained, but the calculation amount increases and measuring time increases
Solution Approach 1:
The system merges multiple measurement functions into a single integrated platform that can measure dimensions, angles, and flatness simultaneously. By combining these measurement capabilities in one system with a unified coordinate framework, the patent reduces the total measurement time compared to using separate measurement systems for each shape factor, while maintaining comprehensive measurement capability.
Solution Approach 2:
The measurement system establishes a unified reference coordinate system in advance before measurements are taken. This preliminary setup of the coordinate framework allows for efficient simultaneous measurement of multiple shape factors without requiring separate coordinate system setups for each measurement type, thereby reducing overall measuring time and improving productivity.
3Manufacturing precision
If specifications are set close to measurement accuracy limits, then stricter quality control is achieved, but the error range of measurement values increases
Solution Approach 1:
The patent implements a feedback mechanism where measurement values are compared against specifications, and when values approach specification limits, the system automatically performs verification measurements. This feedback loop ensures that strict quality control is maintained while managing measurement uncertainty by re-measuring borderline cases, thereby maintaining reliability even when specifications are set close to measurement accuracy limits.
Solution Approach 2:
The measurement system incorporates verification measurement functionality that activates when initial measurements approach specification limits. This beforehand cushioning approach prepares for potential measurement uncertainties by having a built-in re-measurement mechanism, ensuring that strict specifications can be enforced without compromising reliability due to increased error ranges at measurement limits.
Data Source
AI summary
A system for measuring a shape, includes an external storage unit storing tolerances of first and second shape factors defining a design shape of a measuring object; a first measuring tool measuring the first shape factor of the measuring object to obtain measurement data; and a measurement processing unit determining a shape of the measuring object. The measurement processing unit includes; a comparison module comparing the measurement data of the first shape factor with the tolerance of the first shape factor; a verification module composing a predicted shape using the measurement data and verifying whether the predicted shape is formed as a figure; a calculation module calculating predicted data of the second shape factor from the predicted shape; and a determination module determining a measurement shape by comparing the predicted data with the tolerance of the second shape factor.