Integrated Spool Valve Temperature Control Apparatus
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Solution Overview
Problem
Existing temperature control systems for semiconductor manufacturing become overly complex and enlarged when controlling multiple areas, leading to inefficiencies in temperature control precision and throughput.
Innovation Solution
A temperature control apparatus featuring a first and second temperature regulating unit, each with a supply channel, a valve unit with spool valves, and a mixing channel, allowing for precise temperature control by adjusting the flow rates of heating media through electromagnetic solenoids and proportional solenoids, while minimizing system complexity through a heat-insulating coupling of spool valves.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple variable valves are used to control temperature in multiple areas, then temperature control capability is improved, but device complexity increases significantly
Solution Approach 1:
The patent combines multiple variable valves into a single integrated variable valve that can control flow distribution to multiple temperature regulating units simultaneously. This single valve replaces what would traditionally require multiple separate valves, thereby maintaining temperature control capability for multiple areas while significantly reducing device complexity and the number of components.
Solution Approach 2:
The single variable valve is designed with multi-functional capability to control temperature for multiple areas through a single component. This universal valve can adjust flow distribution to different temperature regulating units, eliminating the need for dedicated valves for each area and thus reducing overall system complexity while maintaining versatility.
2Measurement precision
If multiple temperature regulating units are used to control multiple areas, then temperature control precision is improved, but apparatus size increases
Solution Approach 1:
The patent merges the control functions into a single integrated valve unit that serves multiple temperature regulating units. This consolidation approach maintains the precision temperature control capability of multiple regulating units while reducing the overall apparatus size by eliminating redundant valve components and simplifying the system architecture.
3Productivity
If prompt temperature control is implemented, then productivity is improved, but system complexity increases
Solution Approach 1:
The integrated variable valve enables prompt temperature control for multiple areas through a single control mechanism, achieving high productivity by rapidly adjusting flow distribution without the complexity of coordinating multiple separate valves. This merging of control functions maintains responsiveness while simplifying the control system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables prompt and precise temperature control of multiple areas without complicating the apparatus, improving product throughput and maintaining temperature stability across various channels.
Implementation Method 1
the first spool valve and the second spool valve are coupled through a heat insulating layer
Data Source
AI summary
A temperature control apparatus is provided, which is capable of, even when it is necessary to perform control by means of valves in a plurality of channels, promptly controlling a temperature of an area to be temperature-controlled promptly to a desired temperature. Passage and blockage of a heating medium passing through a first supply channel to a mixing channel, a temperature of the heating medium being controlled by a first temperature regulating unit at a predetermined temperature, and passage and blockage of a heating medium passing through a second supply channel to the mixing channel, a temperature of the heating medium being controlled by a second temperature regulating unit, are controlled by a valve unit. The valve unit includes a first spool valve and a second spool valve, which are coupled through a heat insulating layer.