Integrated Spray Nozzle Assembly to Prevent Chamber Contamination
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Solution Overview
Problem
In semiconductor manufacturing, the use of oblique DIW nozzles for substrate treatment leads to contamination of the process chamber due to scattering and reduces productivity, and replacing nozzles for multiple chemicals causes ejection vacuum issues.
Innovation Solution
A spray unit with integrally coupled nozzle heads, including a DIW nozzle positioned between chemical nozzles, allows simultaneous ejection of chemicals and DIW, minimizing contamination and ejection vacuum by controlling nozzle distances and using a connection member for synchronized movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If nozzles are replaced to eject different chemicals, then multiple chemicals can be applied, but ejection vacuum occurs and productivity is reduced
Solution Approach 1:
Multiple nozzle heads that eject different chemicals are integrally coupled together to form a single integrated nozzle assembly. This merging eliminates the need to replace individual nozzles when switching between chemicals, as all nozzle heads remain in place and can be controlled independently through their respective pipes, thereby preventing ejection vacuum and maintaining continuous operation.
Solution Approach 2:
The integrated nozzle assembly serves multiple functions by incorporating multiple nozzle heads within a single structure. Each nozzle head is connected to its own pipe, allowing the assembly to eject different chemicals (first chemical, second chemical, deionized water) without requiring physical replacement, thus achieving multi-functionality while maintaining productivity.
2Productivity
If oblique DIW nozzles are used to prevent nozzle replacement, then ejection vacuum is prevented, but process chamber contamination occurs due to scattering
Solution Approach 1:
The nozzle heads are configured with different ejection orientations tailored to their specific functions. The first and second nozzle heads eject chemicals substantially perpendicular to the substrate to minimize scattering, while the third nozzle head for deionized water is positioned and oriented to effectively rinse the substrate. This localized optimization of ejection angles for each nozzle head eliminates chamber contamination while maintaining continuous operation.
Solution Approach 2:
The integrally coupled nozzle assembly structure acts as an intermediary that enables precise control over each nozzle head's operation. By providing separate pipe connections to each nozzle head within the integrated assembly, the system can independently control the ejection of different chemicals and deionized water, allowing the third nozzle head to effectively clear scattered chemicals from the chamber without causing contamination.
3Adaptability or versatility
If multiple nozzles are replaced independently, then different chemicals can be ejected, but ejection vacuum and nozzle interference occur
Solution Approach 1:
Multiple nozzle heads are integrally coupled together to form a single stable assembly structure. This merging provides mechanical stability and prevents nozzle interference during operation, while each nozzle head maintains its independent chemical ejection capability through separate pipe connections, ensuring both reliability and adaptability.
Solution Approach 2:
While the nozzle heads are integrally coupled for stability, each nozzle head is independently connected to its own pipe, allowing segmented control of chemical ejection. This segmentation enables independent operation of each nozzle head for ejecting different chemicals (first chemical, second chemical, deionized water) without affecting the stability of the overall assembly, thus maintaining ejection reliability while enabling chemical switching.
Data Source
AI summary
A spray unit in which a plurality of nozzle heads are integrally coupled and a substrate treatment apparatus including the spray unit are provided. The substrate treatment apparatus includes: a substrate support unit supporting a substrate and including a spin head, which rotates the substrate; a treatment liquid retrieval unit retrieving substrate treatment liquids used in treating the substrate; and a spray unit including a plurality of nozzle heads and pipes, which are connected to the nozzle heads, and providing the substrate treatment liquids onto the substrate through the nozzle heads and the pipes, wherein the nozzle heads are moved at the same time.