Tunable Wavelength Interference Filter With Integrated Stopper Post

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Solution Overview

Problem

Existing tunable wavelength interference filters face issues with contact between reflective films and electrodes, leading to impaired function and complex manufacturing processes, and manufacturing errors can limit the changeable wavelength range.

Innovation Solution

A tunable wavelength interference filter design featuring a first substrate with a movable part and diaphragm, reflective films, conductive films, and a stopper post on a second substrate, where the stopper post interferes later than the conductive films to prevent unwanted contact and simplify manufacturing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a protrusion is added to prevent contact between reflective films or electrodes, then reliability is improved, but device complexity increases

Engineering Contradiction:

Improveprevention of contact between reflective films and electrodesVSAvoidmanufacturing process complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The stopper post is integrated into the second substrate as part of its structure, combining the contact prevention function with the substrate itself. This eliminates the need for separate protrusion structures and simplifies the overall device architecture while maintaining reliability.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The stopper post is pre-formed as part of the second substrate structure before assembly, so that the contact prevention function is already in place when the device is assembled. This preliminary integration avoids the need for post-assembly modifications and simplifies the manufacturing process.

Inventive Principle:

Principle #10Preliminary action

2Reliability

If a protrusion is added to prevent contact between reflective films or electrodes, then reliability is improved, but manufacturing precision requirements increase

Engineering Contradiction:

Improveprevention of contact between reflective films and electrodesVSAvoidpositioning accuracy of protrusion and reflective films

Core Design Contradiction:

ReliabilityVSManufacturing precision

Solution Approach 1:

By integrating the stopper post into the second substrate structure, the positioning is reference-based on the substrate itself rather than requiring precise alignment between separate components. This reduces the cumulative precision requirements and makes manufacturing more tolerable.

Inventive Principle:

Principle #5Merging (Combining)

3Adaptability or versatility

If the gap size is changed to tune wavelength, then adaptability is improved, but harmful factors increase due to potential interference with protrusions

Engineering Contradiction:

Improvetunable wavelength rangeVSAvoidinterference with stopper post or protrusion

Core Design Contradiction:

Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The stopper post acts as an intermediary element that mediates between the movable first substrate and the fixed second substrate. It provides a controlled interaction point that allows the gap to be adjusted for wavelength tuning while preventing direct harmful contact between the reflective films and electrodes through its positioning function.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents film interference, ensures reliable function, and widens the changeable wavelength range by simplifying the manufacturing process and addressing manufacturing errors.

Implementation Method 1

a first reflective film (5) and a second reflective film (6) disposed facing each other to form a filter region that transmits light of a specific wavelength in accordance with the size of the gap therebetween

Methodology Applied

Scientific EffectLight reflection: Reflection

Implementation Method 2

tunable wavelength interference filter that transmits light of a predetermined wavelength among incident light

Methodology Applied

Scientific EffectInterference: Interference

Implementation Method 3

The first electrode and the second electrode are disposed facing each other to make up an actuator for changing that size of the gap

Methodology Applied

Scientific EffectElectrostatic force: Electrostatics

Data Source

PatentUS20250306255A1Tunable wavelength interference filter

Publication Date: 2025.10.02 SEIKO EPSON CORP

AI summary

A tunable wavelength interference filter includes a first substrate, a first reflective film and a first conductive film formed in the first substrate, a second substrate facing the first substrate, a second reflective film provided at the second substrate and facing the first reflective film with a predetermined gap therebetween, a second conductive film provided at the second substrate and facing the first conductive film, and a stopper post provided as a part of the second substrate, and protruding toward the first substrate so as to be exposed from the second conductive film. The second conductive film includes a stopper film disposed overlapping a peripheral part of the second reflective film, and when the movable part is displaced toward the second substrate, a timing when the stopper post interferes with the first conductive film is later than a timing when the stopper film interferes with the first reflective film.