Integrated Terahertz Imager Chip with On-Chip Antennas

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Solution Overview

Problem

Current Terahertz imaging systems are bulky, expensive, and not sensitive enough at room temperature, limiting their effectiveness for high-resolution imaging applications due to low efficiency of on-chip receiving antennas and reliance on discrete, custom devices.

Innovation Solution

An integrated Terahertz camera with a silicon-based imager chip featuring on-chip antennas and front-end receiver circuits that reduce Terahertz frequencies for processing, incorporating a low-frequency amplifier with controllable gain and frequency response, and a full-wavelength loop antenna design optimized for substrate thickness and radiation reception from both sides.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If discrete and custom THz detector devices are used, then detection capability is achieved, but device size becomes bulky and cost increases

Engineering Contradiction:
Improvedetection capabilityVSAvoiddevice size
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines multiple discrete THz detector devices into a single integrated imager chip containing a pixel array. Each pixel integrates an antenna, receiving circuit, and processing elements, merging functions that previously required separate components. This integration reduces device size while maintaining detection capability through systematic arrangement of pixels on a compact substrate.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The imager chip serves multiple functions: it detects THz radiation, processes signals, and generates images all within a single device. The pixel array can be configured for different imaging modes and the integrated circuitry handles both signal reception and processing, eliminating the need for separate discrete devices for each function.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If discrete and custom THz detector devices are used, then detection capability is achieved, but manufacturing cost increases

Engineering Contradiction:
Improvedetection capabilityVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

By integrating multiple detector functions into a single chip, the patent enables standardized manufacturing processes. The pixel array can be fabricated using conventional semiconductor manufacturing techniques, allowing for mass production and reduced per-unit costs compared to assembling discrete custom devices.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent employs standard semiconductor fabrication parameters and materials that can be produced using existing manufacturing infrastructure. This approach allows leverage of established manufacturing processes and economies of scale, significantly reducing production costs compared to custom discrete device assembly.

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If on-chip receiving antennas are used for integration, then device size is reduced, but antenna efficiency decreases

Engineering Contradiction:
Improvedevice sizeVSAvoidantenna efficiency
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent optimizes antenna design at the local pixel level, configuring each on-chip antenna with specific geometric parameters and materials tailored for THz frequency operation. The antenna structures are designed with appropriate dimensions, shapes, and substrate configurations to maximize efficiency within the constrained on-chip environment.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent introduces intermediate structures such as ground planes, shielding layers, and matching circuits between the antennas and receiving elements. These intermediary components improve antenna efficiency by reducing losses, minimizing interference between adjacent pixels, and optimizing impedance matching, thereby compensating for the inherent limitations of on-chip integration.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Ease of operation

If room temperature operation is implemented, then operational simplicity is improved, but detection sensitivity decreases

Engineering Contradiction:
Improveoperational simplicityVSAvoiddetection sensitivity
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent employs receiving circuit designs and signal processing techniques optimized for room temperature operation. By adjusting circuit parameters, noise filtering, and signal amplification characteristics, the system achieves adequate sensitivity at room temperature for many practical applications, eliminating the need for complex cryogenic cooling systems.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent implements signal processing feedback mechanisms that enhance detection sensitivity through noise reduction algorithms, signal averaging, and adaptive filtering. These software and hardware feedback systems compensate for the reduced sensitivity at room temperature by actively processing and enhancing the detected signals.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves improved responsivity and reduced noise-equivalent power, enabling high-sensitivity Terahertz imaging with lower power consumption and cost, suitable for various applications including security screening and medical imaging.

Implementation Method 1

each pixel of the plurality of pixels of the integrated imager chip comprising an onchip antenna configured to detect the incoming Terahertz radiation

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

a front-end receiver circuit configured to reduce a Terahertz frequency of the incoming Terahertz radiation to a frequency amenable to processing in circuitry on the integrated imager chip

Methodology Applied
Scientific EffectFrequency down-conversion:

Data Source

PatentUS9269731B2Integrated terahertz imaging systems
Publication Date: 2016.02.23 CALIFORNIA INST OF TECH
  • US9269731B2 patent drawing
  • US9269731B2 patent drawing
  • US9269731B2 patent drawing

AI summary

A low-power 4×4-pixel THz camera with responsivity greater than 2.5 MV/W and sub-10 pW/√Hz NEP at 0.25 THz is integrated in 130 nm silicon without using either high-resistivity substrates or silicon lenses. Imaging results with a fully integrated radiating CMOS power source demonstrate the first entirely silicon-based THz imager.