Integrated Tool Hoist for Compact Chamber Cover Maintenance
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Semiconductor processing tools have large and heavy components that are difficult to access and move during maintenance, servicing, and repair due to their compact and tightly packed arrangement, which limits the effectiveness of traditional lifting mechanisms.
Innovation Solution
The integration of a hoisting system within the tool itself, featuring a linear guide system, a moveable carriage, and a hoist arm that can connect with and lift removable components, along with a detachable hoist system that connects to the support framework, allowing for efficient movement and positioning of components without increasing the tool's footprint.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If conventional hoisting equipment (crane or forklift) is used to lift and move components, then the heavy components can be moved, but the maintenance time and labor increase due to difficult access and the need to fully support the equipment by the floor
Solution Approach 1:
The hoisting system is merged with the semiconductor processing tool itself. The linear guide system is mounted to the tool's support framework, and the carriage with hoist arm is integrated into the tool structure, allowing components to be lifted and moved without requiring external floor-supported equipment.
Solution Approach 2:
A carriage acts as an intermediary between the linear guide system and the removable components. The carriage travels along the linear guide system and uses a hoist arm to connect with and lift components, providing a mechanical bridge that enables easy access and movement of heavy components.
2Area of stationary object
If the tool has a compact and tightly packed arrangement of chambers, then the tool footprint is minimized, but the accessibility of components for maintenance becomes difficult
Solution Approach 1:
The linear guide system extends along the linear array of chambers, providing access to components in the horizontal dimension. The carriage can travel along this guide system to reach any chamber, while the hoist arm provides vertical lifting capability, effectively using both horizontal and vertical dimensions to access components without increasing the tool's footprint.
Solution Approach 2:
The integrated hoisting system serves multiple functions: it provides lateral support to the vertical member, enables movement of removable components between chambers, and allows for maintenance and servicing. This multi-functional system addresses both the footprint constraint and the accessibility requirement.
3Adaptability or versatility
If a detachable hoist system connected to the support framework is used, then component movement is enabled, but the system complexity increases
Solution Approach 1:
The hoisting system is segmented into distinct functional components: the linear guide system mounted to the support framework, the movable carriage, and the hoist arm with connecting features. This segmentation allows each component to be optimized independently while maintaining overall system functionality and reducing complexity through modular design.
Data Source
AI summary
Semiconductor processing tools are provided that include a support framework, semiconductor processing chambers arranged along an axis, an attachment point connected to the support framework, and a detachable hoist system. Each chamber includes a base portion fixedly mounted relative to the support framework and a removable top cover including one or more hoisting features. The detachable hoist system includes a vertical member including a top end including a complementary attachment point and a bottom end including a movement mechanism supported by a floor. The complementary attachment point is detachably connected to the attachment point. The detachable hoist system further includes a hoist arm connected to the vertical member. The hoist arm is configured to pivot about a vertical axis substantially perpendicular to the axis, and includes one or more links and a hoist feature engagement interface configured to engage with the hoisting features of any of the removable top covers.