Integrated Vacuum Pump Flange for High-to-Ultra-High Vacuum
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Solution Overview
Problem
Existing vacuum pumping systems are either too large or inefficient when attempting to provide a compact solution for achieving high vacuum levels across different pressure regions, often requiring multiple pumps and conduits that affect gas conductance and are vulnerable to mechanical shocks.
Innovation Solution
A combination of a high pressure getter pump and one or more high vacuum pumps, such as ion or sublimation pumps, mounted on a single flange, which operate without mechanical components and use pulsed voltage to conserve getter material, eliminating the need for a backing pump and reducing mechanical stress.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple pumps are used to achieve high vacuum levels across different pressure regions, then vacuum effectiveness is improved, but system size and complexity increase
Solution Approach 1:
The patent combines a high pressure getter pump and a high vacuum pump into a single integrated unit with a common flange mounting interface. This merging of functions into one compact system maintains the effectiveness of multiple pumps while reducing overall system size and eliminating the need for separate conduits between pumps.
Solution Approach 2:
The integrated pumping system is designed to handle multiple pressure regions (high pressure and high vacuum) within a single unit. The system can operate across different pressure regions by activating appropriate pump components, providing multi-functional capability without requiring separate dedicated systems for each pressure region.
2Productivity
If multiple pumps and conduits are used to achieve high vacuum, then pumping capability is improved, but gas conductance is reduced
Solution Approach 1:
By integrating both pump types into a single unit with direct internal connection, the system eliminates external conduits that would restrict gas flow. The direct coupling between pump components maintains high gas conductance while preserving the enhanced pumping capability of the multi-pump configuration.
3Reliability
If mechanical pumps are used to achieve vacuum, then pumping effectiveness is improved, but vulnerability to mechanical shocks increases
Solution Approach 1:
The patent employs getter pumps that use non-mechanical pumping mechanisms. Instead of relying on mechanical moving parts, the system uses evaporated getter material that chemically adsorbs gas molecules to create vacuum. This substitution of mechanical systems with chemical/physical processes eliminates vulnerability to mechanical shocks while maintaining pumping effectiveness.
4Productivity
If evaporable getter pump uses continuous voltage to operate at high pressure, then pumping speed is improved, but getter material depletes rapidly
Solution Approach 1:
The evaporable getter pump operates using pulsed voltage rather than continuous voltage. The controller applies voltage in periodic pulses, causing the getter material to evaporate and deposit in cycles. This periodic action maintains effective pumping speed during active pulses while allowing the system to conserve getter material during non-pulse periods, extending the pump's operational lifetime.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for a compact, efficient, and reliable vacuum pumping system that maintains high vacuum levels without mechanical shocks, reducing the need for conduits and enabling operation from relatively high pressures to ultra-high vacuums with a single power supply and controller.
Implementation Method 1
the evaporable getter to operate effectively at higher pressures, the length of the pulses being controlled to control the amount of evaporation of the getter material
Implementation Method 2
said sublimation pump comprises a titanium sublimation filament configured on heating to cause said titanium to sublimate and deposit an active layer of titanium on surrounding surface walls
Implementation Method 3
it comprises an ion getter pump
Data Source
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AI summary
A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10-2 mbar to a second pressure between 10-3 mbar and 10-6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.