Integrated Vapor Deposition Source Design for Heat Blocking
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Solution Overview
Problem
Conventional vapor deposition sources are bulky and costly due to the separate placement of crucibles, heaters, and nozzle portions, which increases the volume and installation costs, and requires high-power conveyers for efficient operation.
Innovation Solution
A vapor deposition source design where the crucible, heating portion, and nozzle portion are integrated within a single housing, utilizing a plate heater and adiabatic materials to minimize heat dispersion and optimize heat blocking, with a conveyer system that reduces power output by aligning multiple sources for concentrated deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the crucible, heater, and nozzle portion are disposed in separate defined spaces, then the heat blocking function is improved, but the volume of the vapor deposition source increases
Solution Approach 1:
The patent merges the crucible, heater, and nozzle portion into a single integrated housing structure. The crucible is positioned within the housing, the heater is mounted on the inner wall of the housing adjacent to the crucible, and the nozzle portion extends through the housing to communicate with the crucible interior. This integration eliminates the need for separate heat blocking structures between these components, thereby reducing the overall volume while maintaining effective heat control through the housing walls and strategic component placement.
2Object-affected harmful factors
If adiabatic materials are installed throughout the vapor deposition source, then the heat blocking function is improved, but the installation cost increases
Solution Approach 1:
The patent extracts the adiabatic materials from the interior spaces between components and relocates them exclusively to the housing walls and strategic external positions. The housing itself is designed with heat blocking properties, and adiabatic materials are applied only where structurally necessary for heat containment. This selective placement maintains effective heat blocking while significantly reducing the quantity of adiabatic materials required, thereby lowering installation costs.
3Object-affected harmful factors
If the vapor deposition source is increased in volume, then the heat blocking function is improved, but the power consumption of the conveyer increases
Solution Approach 1:
By integrating the crucible, heater, and nozzle portion into a compact housing, the patent reduces the overall volume and mass of the vapor deposition source. This compact design decreases the power consumption of the conveyer system required to move the source during operation. Simultaneously, the housing is designed with inherent heat blocking capabilities through its structure and selective adiabatic material placement, maintaining effective heat containment without requiring increased volume.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The integrated design reduces the size and weight of the vapor deposition source, enhances deposition uniformity, and lowers the power requirements for conveyance, improving the overall efficiency and quality of thin film deposition.
Implementation Method 1
a heating portion installed adjacent to the crucible in the housing for heating the crucible
Implementation Method 2
a device for heating deposition materials in a crucible to a predetermined temperature (approximately 1200° C. in the case of Al)
Implementation Method 3
a plurality of adiabatic materials is disposed over the entirety of the vapor deposition source in order to prevent heat of high temperature created by the heater from being discharged to the exterior of the vapor deposition source
Implementation Method 4
a crucible mounted in the housing for vaporizing deposition materials
Implementation Method 5
a nozzle portion installed so as to inject the vaporized deposition materials through an injection nozzle into a substrate disposed at an exterior of the housing
Data Source
AI summary
A vapor deposition source has a reduced size by disposing a crucible, a heating portion, and a nozzle portion in one defined space. A vapor deposition apparatus deposits deposition materials on a substrate using the vapor deposition source. The vapor deposition source includes a housing, and the crucible is mounted in the housing for vaporizing the deposition materials. The heating portion is installed adjacent to the crucible in the housing for heating the crucible. The nozzle portion injects the vaporized deposition materials into a substrate disposed at an exterior of the housing through an injection nozzle. The vapor deposition source is manufactured in a smaller and lightweight form in comparison with conventional vapor deposition sources in which a crucible and a nozzle portion are arranged in different spaces. The diameter and number of injection nozzles of the invention are restricted to block radiant heat discharged from the vapor deposition source, so that deposition materials are uniformly deposited. Furthermore, the output power of a conveyer for conveying the vapor deposition source is reduced. In addition, a plurality of vapor deposition sources is arranged in a line to perform concentrated deposition of deposition materials so that quality of the resultant product is improved.