Integrated Water Pan for Semiconductor Processing Apparatus
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Solution Overview
Problem
The existing processing apparatuses require extensive operations to set and adjust the position of a separate water pan to collect leaked processing water, leading to cumbersome and labor-intensive procedures.
Innovation Solution
A processing apparatus with a water pan fixed to its bottom through legs, incorporating a water leakage sensor and discharge mechanism, allowing for efficient collection and detection of leaked water without the need for separate setup or positioning adjustments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a separate water pan is provided below the processing apparatus to receive leaked water, then water leakage prevention is improved, but the complexity of setting and positioning the water pan increases
Solution Approach 1:
The water pan is integrated with the processing apparatus by fixing it to the bottom surface of the housing, merging two previously separate components (water pan and processing apparatus) into a single unified structure. This eliminates the need for separate setting operations and positioning adjustments, resolving the contradiction between leakage prevention and setup complexity
Solution Approach 2:
The water pan is pre-fixed to the bottom of the processing apparatus during manufacturing, so that when the processing apparatus is installed, the water pan is already in its correct position. This preliminary action eliminates the need for subsequent positioning operations, reducing setup complexity while maintaining reliable leakage prevention
2Reliability
If a separate water pan is provided below the processing apparatus, then water collection capability is improved, but the time required for position adjustment increases
Solution Approach 1:
By merging the water pan with the processing apparatus into a single integrated unit, the patent eliminates the time-consuming process of separately positioning the water pan. The water collection capability is maintained through the integrated design while the positioning time is reduced to zero during installation
Solution Approach 2:
The water pan is pre-positioned and fixed to the processing apparatus before delivery, so no position adjustment time is required during installation. This preliminary positioning action resolves the contradiction between maintaining water collection capability and reducing positioning time
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Eliminates the need for extensive operations to set up a separate water pan, enabling quick detection and discharge of leaked water, thus simplifying the setup and position adjustment process.
Implementation Method 1
The water pan has a bottom wall inclined with respect to a horizontal plane, and the water leaked to the water pan is collected at a predetermined low position set on the bottom wall of the water pan
Data Source
AI summary
A processing apparatus includes a chuck table for holding a workpiece, a processing unit for processing the workpiece held on the chuck table as supplying a processing water to the workpiece, and a water pan fixed to a bottom of the processing apparatus for receiving the processing water as a water leaked.