Integrated Waveguide Polarizer Using Tapered Si-SiN Layers

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Solution Overview

Problem

Conventional on-chip waveguide polarizers fail to achieve a broad optical bandwidth and high polarization extinction ratio while maintaining low device loss, often requiring complex manufacturing processes and increasing costs.

Innovation Solution

The integration of cascaded silicon and silicon nitride transitions with tapered shapes and oxide layers, where the silicon-nitride layers are disposed above the silicon layers, creating a separation spacing, induces differential losses for TE and TM polarization states, resulting in a high extinction ratio, low device loss for TE, and broad optical bandwidth.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional approaches (shallowly etched ridge waveguides, waveguide bends, asymmetric directional couplers) are used, then polarization extinction ratio may be improved, but optical bandwidth is reduced and device loss increases

Engineering Contradiction:
Improvepolarization extinction ratioVSAvoidoptical bandwidth
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent introduces a vertical dimension by stacking silicon and silicon nitride layers to form a multi-layer waveguide structure. This vertical layering enables differential polarization control through the distinct optical properties of each material layer, achieving high extinction ratio without compromising bandwidth. The vertical dimension allows independent optimization of TE and TM mode confinement, resolving the contradiction between extinction ratio and bandwidth.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent employs a composite waveguide structure combining silicon and silicon nitride layers. Each material contributes its unique optical properties: silicon provides strong confinement for both polarizations, while silicon nitride offers lower loss and different refractive index characteristics. This composite approach enables simultaneous optimization of polarization discrimination and optical bandwidth, overcoming the limitations of single-material conventional designs.

Inventive Principle:
Principle #40Composite materials

2Ease of operation

If conventional approaches (carrier injection-based polarizers) are used, then polarization control may be achieved, but manufacturing complexity and costs increase due to additional ion implantation processes

Engineering Contradiction:
Improvepolarization control capabilityVSAvoidmanufacturing process complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent extracts the active carrier injection mechanism and replaces it with a passive geometric and material-based polarization control structure. By removing the need for ion implantation and electrical control, the design eliminates complex manufacturing steps while maintaining effective polarization discrimination through the inherent optical properties of the multi-layer structure.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The multi-layer waveguide structure achieves polarization control passively through its own geometric configuration and material properties, without requiring external electrical power or active control mechanisms. The structure self-regulates polarization transmission through differential mode confinement, eliminating the need for complex external control systems and simplifying both manufacturing and operation.

Inventive Principle:
Principle #25Self-service

3Ease of operation

If waveguide bends and mode converters are integrated onto the optical waveguide, then polarization transformation may be achieved, but manufacturing costs increase due to specific design requirements

Engineering Contradiction:
Improvepolarization transformation capabilityVSAvoidmanufacturing cost
Core Design Contradiction:
Ease of operationVSEase of manufacture

Solution Approach 1:

The patent achieves polarization transformation within the vertical dimension through the multi-layer structure, eliminating the need for lateral waveguide bends and complex mode converter geometries. The vertical stacking enables in-situ polarization control at the transition point, reducing manufacturing complexity associated with precise bend radius and alignment requirements.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables a high polarization extinction ratio, low device loss for the TE polarization state, and a broad optical bandwidth, while simplifying the manufacturing process and reducing power consumption, making it suitable for various optical waveguides.

Implementation Method 1

the transitioning between each silicon-nitride and silicon layers inducing losses on the transverse-electric (TE) and the transverse-magnetic (TM) polarization states of the optical signal

Methodology Applied
Scientific EffectOptical absorption: Absorption (EM radiation)

Data Source

PatentUS11579367B2Integrated waveguide polarizer
Publication Date: 2023.02.14 ALPINE OPTOELECTRONICS INC
  • US11579367B2 patent drawing
  • US11579367B2 patent drawing
  • US11579367B2 patent drawing

AI summary

An integrated waveguide polarizer comprising: a plurality of silicon layers and a plurality of silicon-nitride layers; each of the plurality of silicon layers and each of the plurality of silicon-nitride layers having a first end and an opposite second end, the first end having a wide width and the second end having a narrow width, such that each silicon layer and each silicon-nitride layer have tapered shapes; wherein the pluralities of silicon and silicon-nitride layers are overlapped, such that at least a portion of each silicon-nitride layer overlaps at least a portion of each silicon layer; and a plurality of oxide layers disposed between the pluralities of silicon-nitride and silicon layers, each oxide layer creating a separation spacing between each silicon-nitride and each silicon layers; wherein, when an optical signal is launched through the integrated waveguide polarizer, the optical signal is transitioned between each silicon-nitride layer and each silicon layer.