Integrating Sphere Photoreflectance Device for Rough Surface Characterization

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Solution Overview

Problem

Existing photoreflectance devices face challenges in characterizing rough surfaces due to low signal-to-noise ratios and interference from diffused pump beams, which reduces the accuracy of measurements.

Innovation Solution

A photoreflectance device incorporating an integrating sphere to collect and separate the probe and pump beams, along with high-pass filtering and dual-frequency modulation to enhance signal detection and eliminate interference, thereby improving the signal-to-noise ratio and accuracy of measurements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If the surface is rough, then the probe beam is diffused, but the intensity of the reflected probe beam becomes low and the signal-to-noise ratio deteriorates

Engineering Contradiction:
Improveintensity of reflected probe beamVSAvoidsignal-to-noise ratio
Core Design Contradiction:
Illumination intensityVSMeasurement precision

Solution Approach 1:

The patent employs an integrating sphere with a curved internal surface to collect and redirect diffused light from rough surfaces. The spherical geometry ensures multiple reflections and uniform light distribution, capturing probe beam photons that would otherwise be lost in diffuse scattering, thereby restoring signal intensity without compromising measurement precision.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The integrating sphere acts as an intermediary between the rough surface and the detector. It receives the diffused probe beam, performs multiple internal reflections to redistribute light uniformly, and presents a concentrated, uniform signal to the detector, effectively decoupling the detector from the complexity of direct diffuse reflection measurement.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If the surface is rough, then the pump beam is diffused, but the diffused pump beam interferes with the measurement of the reflected probe signal

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidinterference from diffused pump beam
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The integrating sphere is segmented with distinct input ports and output ports. The pump beam enters through a dedicated input port while the probe beam measurement occurs at a separate output port. This spatial segmentation allows the diffused pump beam to be contained within the sphere and prevented from reaching the detector, eliminating interference while maintaining measurement reliability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The pump beam is extracted and isolated from the measurement path using separate optical ports on the integrating sphere. By providing a dedicated entry point for the pump beam that does not overlap with the probe beam detection path, the harmful diffused pump light is effectively removed from the measurement channel, preserving signal integrity.

Inventive Principle:
Principle #2Taking out (Extraction)

3Device complexity

If conventional detection means are used, then the setup is simple, but the detected reflected signal is weak and the signal-to-noise ratio is very poor

Engineering Contradiction:
Improvedetection setup complexityVSAvoidsignal-to-noise ratio
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The integrating sphere's curved geometry provides inherent light redistribution and concentration capabilities. By strategically positioning the detector at specific locations on the sphere and using appropriate ports, the system achieves enhanced signal collection from rough surfaces without requiring complex optical train arrangements, maintaining relative simplicity while dramatically improving signal-to-noise ratio.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device effectively increases the detected light intensity from rough surfaces, reduces interference from pump beams, and enhances the signal quality by using an integrating sphere and dual-frequency modulation, allowing for more accurate characterization of semiconductor materials.

Implementation Method 1

a large part of the probe beam is diffused instead of being reflected

Methodology Applied
Scientific EffectDiffusion: Scattering

Implementation Method 2

The integrating sphere makes it possible to collect the light coming from the probe beam and diffused by the roughnesses

Methodology Applied
Scientific EffectIntegration of light:

Implementation Method 3

a high-pass filter arranged between the first output of the integrating sphere and the detection means. This high-pass filter makes it possible to filter the pump beam

Methodology Applied
Scientific EffectFrequency filtering: Filter (optical)

Implementation Method 4

first modulating means capable of modulating the probe beam at a frequency different from that of the pump beam

Methodology Applied
Scientific EffectFrequency modulation: Phase Modulation

Implementation Method 5

a monochromatic probe beam to measure the light intensity reflected at the surface of a sample by means of a photodetector

Methodology Applied
Scientific EffectPhotodetection: Photoelectric Effect

Data Source

PatentEP2932236B1Photoreflectance device
Publication Date: 2016.08.24 NEXCIS
  • EP2932236B1 patent drawingFigure 1~3

AI summary

The invention concerns a photoreflectance device (1) for characterising a rough surface comprising: - Means (2) for emitting a pump beam (3); - Means (8) for emitting a probe beam (11); - Means (14) for detecting the probe beam reflected by the surface; - An integrating sphere (13) capable of collecting the probe beam reflected by the surface, the integrating sphere comprising: - a first output (15) connected to the detection means (14), and disposed so as to receive a majority of the probe beam (11) reflected by the surface (4); - a second output (16) arranged so as to receive a majority of the pump beam (3) reflected by the surface.