Intensity Segmentation and Edge Detection for Semiconductor Care Areas
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Solution Overview
Problem
Current methods for setting up care areas (CAs) in semiconductor inspection are computationally expensive, require access to design information which may not be available, and are time-consuming due to manual drawing, lacking flexibility and efficiency.
Innovation Solution
A system and method using image intensity and edge detection to segment and define care areas based on specimen structures, independent of design information, allowing for automated and efficient CA setup.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If design-based CA methods are used, then manufacturing precision is improved, but computational expense increases and device complexity increases
Solution Approach 1:
The patent replaces design-based CA generation (which requires complex computational processing of GDS files) with intensity-based segmentation using imaging subsystem data. This substitutes a computationally intensive mechanical/info processing system with a simpler image processing approach that uses readily available intensity information from the inspection tool's imaging subsystem.
Solution Approach 2:
The patent creates CAs by copying and processing intensity information from the imaging subsystem's area of interest image, rather than accessing and processing the original design data. This creates a simplified replica of the necessary information that achieves the same CA generation goal with less computational expense.
2Manufacturing precision
If design-based CA methods are used, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The patent replaces the complex system requiring GDS file access and design data processing with a simpler system that uses only the imaging subsystem's image data. This substitution eliminates the need for external design information access and complex data processing pipelines.
Solution Approach 2:
The imaging subsystem provides its own image data that is directly used for CA generation without requiring external design information. The system serves itself by using its own captured images and intensity information to generate the care areas it needs.
3Ease of operation
If manual CA drawing is used, then ease of operation is improved, but productivity deteriorates
Solution Approach 1:
The system automatically generates CAs by processing intensity information from the imaging subsystem's area of interest image, eliminating the need for manual drawing. This self-service approach maintains operational simplicity while dramatically improving productivity by automating the CA generation process.
Solution Approach 2:
The patent creates CAs by copying and processing intensity information from the imaging subsystem's area of interest image, rather than accessing and processing the original design data. This creates a simplified replica of the necessary information that achieves the same CA generation goal with less computational expense.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves inspection sensitivity by creating intensity-based CAs, reduces computational expense, and eliminates the need for design access, providing flexible and time-efficient CA setup.
Implementation Method 1
an imaging subsystem configured for generating images of a specimen
Implementation Method 2
segmenting the area of interest image based on intensity of pixels in the area of interest image thereby separating the area of interest image into pixels corresponding to one or more specimen structures
Implementation Method 3
detecting edges of the one or more specimen structures in the area of interest image based on the pixels corresponding to the one or more specimen structures
Data Source
AI summary
Methods and systems for setting up care areas (CAs) for inspection of a specimen are provided. One system includes a computer subsystem configured for acquiring an area of interest image for a specimen from images of the specimen generated by an imaging subsystem. The computer subsystem segments the area of interest image based on intensity of pixels in the image thereby separating the image into pixels corresponding to one or more specimen structures in the image having an intensity different than other pixels in the image. In addition, the computer subsystem detects edges of the specimen structure(s) in the image based on the pixels corresponding to the specimen structure(s) and determines characteristic(s) of one or more CAs in the images of the specimen based on the detected edges. The computer subsystem further stores information for the CA(s) for use in inspection of the specimen.