Interactive Mask Coloring for IC Design Conflict Resolution
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Solution Overview
Problem
In integrated circuit design, the conventional batch assignment of mask colors in dual patterning techniques often leads to color conflicts in densely packed designs, necessitating costly redesign, retesting, and re-verification, as color assignment is typically done at the end of the process rather than during layout design.
Innovation Solution
An interactive coloring technique allows for real-time mask color assignment during the design process, enabling users to visualize and resolve potential conflicts early on, using a system with a client interface that facilitates cluster creation and management, allowing for efficient runtime mask assignment and consistent redesign.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If batch color assignment is performed at the end of the design process, then the design can be finalized and verified, but color conflicts arise that require costly redesign and retesting
Solution Approach 1:
The system performs color assignment during the layout design process itself, rather than waiting for finalization. As shapes are placed and adjacencies are detected, colors are assigned in real-time, allowing conflicts to be identified and resolved before the design is finalized, eliminating the need for costly post-verification redesign
Solution Approach 2:
The system provides real-time feedback by displaying color assignments and detecting conflicts as the user works. When two shapes are placed close together, the system immediately detects the potential conflict and allows the user to resolve it during the design process, rather than discovering the conflict after verification
2Ease of manufacture
If colors are assigned in batches during finalization, then the design process is simplified, but significant re-work is required when conflicts are discovered
Solution Approach 1:
Color assignment is performed preliminarily during the layout design phase rather than at finalization. The system continuously monitors shape placements and assigns colors in real-time, preventing conflicts from arising in the first place and eliminating the need for complex post-verification redesign
3Productivity
If runtime color assignment is implemented, then conflicts can be resolved early in the design process, but the system complexity increases
Solution Approach 1:
The system performs color assignment preliminarily as shapes are placed, using real-time adjacency detection to assign colors immediately. This prevents conflicts before they arise, improving productivity by eliminating the need for costly post-verification redesign and rework
Solution Approach 2:
The system automatically detects adjacencies and assigns colors without requiring manual intervention. When shapes are placed close together, the system automatically detects the potential conflict and allows the user to resolve it through simple interface interactions, reducing the overall complexity burden
Data Source
AI summary
A hierarchical schematic design editor displays mask layers for each shape as mask specific colors and alerts a user to mask layer conflicts during the design and editing process. According to an embodiment, mask colors may be assigned at the time the shapes or geometries and cells are placed in a circuit design layout, or when a mask layer condition indicating that two or more shapes should be set to different mask layers is detected. In an embodiment, if the distance between two shapes is less than a predetermined threshold, those shapes may cause a mask layer condition. Shapes may be grouped to facilitate mask layer condition detection and mask layer assignment.


