Interchangeable Coating Sources in Single Deposition Chamber
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Solution Overview
Problem
Conventional coating technologies face challenges such as increased costs and complexity due to the need for conductive shields, uneven coatings from unfiltered ion particles, and the inefficiency of replacing targets within vacuum chambers, as well as reduced manufacturing throughput from requiring multiple deposition chambers for multi-layer coatings.
Innovation Solution
An apparatus with a common deposition chamber and interchangeable coating equipment, including metal filtered arc ion sources and laser ablation sources, connected via identical flanges, allowing for flexible configuration and efficient operation without the need for shields or frequent target replacements, and enabling simultaneous or successive deposition of different layers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If two plasma sources are directed toward each other to increase deposition rate, then deposition rate is improved, but equipment complexity and cost increase due to required conductive shields
Solution Approach 1:
The patent combines multiple coating equipment (metal filtered arc ion source, laser ablation source, ion source) into a single deposition chamber, eliminating the need for separate chambers and reducing overall equipment complexity while maintaining high deposition rates through simultaneous or successive operation of multiple sources
Solution Approach 2:
The patent removes the conductive shields that would be required between opposingly directed plasma sources by instead using angled emission directions (>90° but <175°) and strategic positioning of sources around the chamber, thereby reducing equipment complexity and cost while preserving high deposition productivity
2Productivity
If conventional PVD methods use unfiltered plasma flow to increase deposition rate, then deposition rate is improved, but coating quality deteriorates due to uneven coatings from ion particles of different sizes
Solution Approach 1:
The patent segments the plasma flow into filtered and unfiltered components using metal filters that selectively allow desired ion particles to pass while blocking unwanted particles of different sizes, thereby maintaining high deposition rates while ensuring uniform coating quality
Solution Approach 2:
The patent introduces metal filters as intermediary elements between the plasma sources and the deposition chamber that mediate the plasma flow by filtering out unwanted particles while allowing desired coating materials to pass through, thus resolving the conflict between deposition rate and coating quality
3Adaptability or versatility
If target replacement is required for multi-layer coatings, then coating versatility is improved, but manufacturing time increases due to chamber opening and target replacement operations
Solution Approach 1:
The patent creates a universal deposition chamber that can accommodate multiple types of coating equipment (metal filtered arc ion source, laser ablation source, ion source) that can be operated in various combinations and sequences, enabling multi-layer coatings with different materials without requiring chamber opening or physical target replacement
Solution Approach 2:
The patent enables continuous coating operations by allowing successive deposition of different layers using different coating equipment within the same vacuum environment, eliminating interruptions caused by chamber opening and target replacement, thus maintaining continuous useful action throughout the multi-layer coating process
4Manufacturing precision
If multiple deposition chambers are used for different layers to improve coating quality, then coating quality is improved, but equipment cost and complexity increase
Solution Approach 1:
The patent merges multiple coating equipment that would traditionally require separate deposition chambers into a single shared chamber, allowing different coating processes (metal filtered arc ion deposition, laser ablation deposition, ion deposition) to occur in the same vacuum environment, thereby reducing equipment cost and complexity while maintaining high coating quality through controlled successive or simultaneous deposition
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces equipment costs and complexity, improves coating homogeneity, and increases manufacturing throughput by allowing for flexible equipment configuration and efficient deposition of various layers within a single chamber, enhancing the flexibility and efficiency of the coating process.
Implementation Method 1
an apparatus which generates a plasma of various coating materials for deposition on surfaces of parts
Implementation Method 2
at least one of said coating equipment is a metal filtered (or not filtered) arc ion source
Implementation Method 3
at least one other of said coating equipment is a laser ablation source
Data Source
AI summary
An apparatus for coating parts, comprising a deposition chamber (1) and a plurality of coating equipments (2, 3) for simultaneously or successively providing coating materials to said deposition chamber, wherein at least one of said coating equipment (2) is a metal filtered arc ion source, wherein at least one other of said coating equipment (3) is a laser ablation source, At least two of said coating equipments are removably connected to said deposition chamber via connecting flanges (10). At least two of said flanges are identical, so that one said coating equipment (2, 3) can be connected via different flanges to said deposition chamber.