Interdigitated Gate Line Transistor for Low Noise Amplifier

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Solution Overview

Problem

Current transistor designs in low noise amplifiers, such as those used in wireless RF systems, face inefficiencies due to inadequate parameters like gate resistance and gate-to-body capacitance, which affect performance.

Innovation Solution

The semiconductor device incorporates a specific gate line configuration on a silicon-on-insulator substrate with intersecting gate lines and doped regions, along with protrusions over drain regions, to enhance transistor architecture and improve performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional transistor designs are used in low noise amplifiers, then the device structure is simple, but the performance parameters such as gate resistance, gate to body capacitance, and noise figure are insufficient

Engineering Contradiction:
Improvetransistor performanceVSAvoidgate structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The gate electrode is divided into multiple gate lines (first gate line, second gate line, third gate line, fourth gate line) arranged in an interdigitated pattern. This segmentation allows each gate line to contribute to the overall gate control while reducing the effective gate resistance through parallel conduction paths, and optimizes the gate-to-body capacitance distribution across the device area.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The gate lines are arranged in a two-dimensional interdigitated pattern rather than a simple linear configuration. The first and second gate lines extend in a first direction while the third and fourth gate lines extend in a second direction, creating a grid-like structure that increases the effective gate perimeter and optimizes electrical characteristics without proportionally increasing device area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If the gate structure is optimized for better performance, then noise figure and linearity improve, but the manufacturing process becomes more complex

Engineering Contradiction:
Improvenoise figureVSAvoidfabrication complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The segmented gate structure with multiple gate lines provides multiple parallel conduction paths that reduce gate resistance and optimize capacitance distribution, leading to improved noise figure and linearity performance while maintaining compatibility with standard semiconductor fabrication processes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The interdigitated gate line configuration creates locally optimized electric field distributions and current density patterns throughout the device. This local optimization of electrical characteristics contributes to overall improved noise performance and linearity while the regular repeating pattern maintains manufacturing feasibility.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS11658118B2Transistor structure in low noise amplifier
Publication Date: 2023.05.23 UNITED MICROELECTRONICS CORP
  • US11658118B2 patent drawing
  • US11658118B2 patent drawing

AI summary

A semiconductor device includes a first gate line and a second gate line extending along a first direction, a third gate line extending along a second direction and between and directly contacting the first gate line and the second gate line, a drain region adjacent to one side of the third gate line, a fourth gate line extending along the second direction and between and directly contacting the first gate line and the second gate line, and a first metal interconnection extending along the second direction between the third gate line and the fourth gate line. Preferably, the third gate line includes a first protrusion and the fourth gate line includes a second protrusion.