Interdigitated Planar Inductor Terminals for Series Resistance Reduction

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Solution Overview

Problem

Designing integrated circuits with high-quality inductors is challenging due to the difficulty in minimizing series resistance, which affects the quality factor and efficiency of resonant circuits, particularly in portable applications where power dissipation is a concern.

Innovation Solution

The approach involves forming a conductive loop with interdigitated fingers and a serpentine gap in an ultra-thick conductive layer, coupled with a lower resistivity material, and using multiple conductive vias to reduce series resistance and enhance current routing, thereby increasing the quality factor of the inductor system.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional inductor designs are used in integrated circuits, then the device can be manufactured with standard processes, but the series resistance is high which reduces the quality factor

Engineering Contradiction:
Improvequality factorVSAvoidseries resistance
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent transitions from planar 2D conductive traces to a 3D vertically-stacked conductive structure. Multiple conductive layers are stacked vertically with vias connecting them, creating a three-dimensional current path that reduces series resistance while maintaining a compact footprint suitable for integrated circuit manufacturing.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The inductor employs composite conductive structures combining multiple conductive layers of different materials and thicknesses. The first conductive layer has higher thickness and lower resistivity than the second conductive layer, creating a composite structure that optimizes both electrical performance and manufacturability.

Inventive Principle:
Principle #40Composite materials

2Loss of energy

If the conductive loop uses a single thick conductive layer, then series resistance is reduced, but the device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improveseries resistanceVSAvoidconductive structure complexity
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The conductive structure is segmented into multiple discrete conductive layers (first conductive layer and second conductive layer) connected by vias. This segmentation allows each layer to be optimized independently for thickness and resistivity while maintaining overall manufacturability through standard multi-layer IC fabrication processes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the conductive structure have different properties: the first conductive layer has greater thickness and lower resistivity than the second conductive layer. This local variation in quality optimizes current flow in different regions, reducing overall series resistance while keeping the structure manufacturable.

Inventive Principle:
Principle #3Local quality

3Reliability

If standard conductive layers are used, then manufacturing is easier, but the quality factor is insufficient for high-performance resonant circuits

Engineering Contradiction:
Improvequality factorVSAvoidconductive layer fabrication
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent modifies key parameters of the conductive layers, specifically increasing the thickness of the first conductive layer and selecting materials with lower resistivity. These parameter changes improve the quality factor by reducing series resistance while remaining compatible with extended IC manufacturing capabilities.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design effectively reduces series resistance by approximately one order of magnitude, leading to improved battery life and increased quality factor in resonant circuits, making it suitable for portable applications.

Implementation Method 1

A technique for reducing series resistance of an inductor system, which may increase the quality factor of the inductor system

Methodology Applied
Scientific EffectElectrical Resistance: Electrical Resistance

Implementation Method 2

The at least one second conductive finger is interdigitated with the at least one first conductive finger without directly contacting the at least one first conductive finger

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 3

The apparatus may include at least one first conductive via coupled to a second conductive layer and coupled the at least one first conductive finger, respectively

Methodology Applied
Scientific EffectElectrical Conduction: Conduction (electrical)

Data Source

PatentUS10355642B2Comb terminals for planar integrated circuit inductor
Publication Date: 2019.07.16 SILICON LABORATORIES INC
  • US10355642B2 patent drawing
  • US10355642B2 patent drawing
  • US10355642B2 patent drawing

AI summary

A technique for reducing series resistance of an inductor system, which may increase the quality factor of the inductor system, has been disclosed. An apparatus includes a conductive loop formed from a first conductive layer. The conductive loop comprises a first terminal and a second terminal. The first terminal includes at least one first conductive finger in the first conductive layer. The second terminal includes at least one second conductive finger in the first conductive layer. The at least one second conductive finger is interdigitated with the at least one first conductive finger without directly contacting the at least one first conductive finger. The apparatus may include a serpentine gap in the first conductive layer. The apparatus may include at least one first conductive via coupled to a second conductive layer and coupled the at least one first conductive fingers, respectively.