Interdigitated Shield for Vacuum Positioning Structure
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Solution Overview
Problem
Existing semiconductor equipment systems face challenges in maintaining a vacuum environment while effectively shielding actuators from electromagnetic fields, which can lead to positioning errors and increased complexity with radiation cooling and Peltier elements.
Innovation Solution
A positioning and support structure with a first and second shield part, where the shield parts are movable and interdigitated to provide comprehensive shielding of electromagnetic fields, allowing for precise movement in all six degrees of freedom while maintaining a vacuum environment, and incorporating a non-operative state for energy efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a vacuum environment is used for the positioning and support structure, then positioning precision is improved, but electromagnetic field shielding becomes more difficult
Solution Approach 1:
The shield is divided into a first shield part attached to the first member and a second shield part attached to the second member. These segmented shield parts can move relative to each other while maintaining electromagnetic field shielding, allowing the positioning structure to operate in vacuum with improved precision without compromising shielding effectiveness.
2Adaptability or versatility
If shield parts are made movable to allow positioning, then positioning flexibility is improved, but shielding effectiveness deteriorates
Solution Approach 1:
The shield parts are designed to be movable rather than fixed, allowing them to move with the first and second members during positioning operations. This dynamic shielding configuration maintains electromagnetic field shielding effectiveness while accommodating the full range of motion required for six-degree-of-freedom positioning flexibility.
3Measurement precision
If actuators are shielded from electromagnetic fields, then positioning accuracy is improved, but device complexity increases
Solution Approach 1:
The shielding function is merged with the existing first and second members of the positioning structure. The first shield part is attached to the first member and the second shield part to the second member, combining the shielding function with the structural components already present in the system, thereby improving positioning accuracy without significantly increasing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively shields electromagnetic fields, ensuring precise positioning and movement within the vacuum environment, reducing the risk of errors and complexity, and enabling energy-efficient operation by minimizing the need for recalibration and heat dissipation.
Implementation Method 1
a shield is present so as to shield the surface of the first member from electromagnetic fields generated by said at least one motor
Data Source
AI summary
The invention relates to a charged particle system provided with a support and positioning structure for supporting and positioning a target on a table, the support and positioning structure comprising a first member and a second member and at least one motor so as to move the first member relative to the second member, wherein a shield is present to shield at least one charged particle beam from electromagnetic fields generated by said at least one motor, the support and positioning structure further comprising a spring mechanically coupling the first member and the second member for at least partially bearing the weight of the first member, table and target.