Interference Filter Alloy Mirrors for Reflectance Stability

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Solution Overview

Problem

Existing interference filters face performance drops due to poor high-temperature resistance and process resistance of silver films, leading to reduced reflectance and transmittance over time, especially when exposed to aging and processing conditions.

Innovation Solution

The use of Ag-Sm-Cu alloy films or Ag-Bi-Nd alloy films with specific atomic content ranges (0.1-0.5 atom% for Sm and Cu, and 0.1-3 atom% for Bi and Nd) as reflecting films, which maintain reflectance comparable to pure silver while enhancing high-temperature and process resistance, and are deposited within a thickness range of 30-80 nm to minimize reflectance and transmittance changes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If pure silver film is used for mirrors, then high reflectance is achieved, but high-temperature resistance and process resistance are poor

Engineering Contradiction:
ImprovereflectanceVSAvoidhigh-temperature resistance and process resistance
Core Design Contradiction:
Illumination intensityVSReliability

Solution Approach 1:

The patent uses composite alloy films (Ag-Sm-Cu and Ag-Bi-Nd) combining multiple metallic elements to achieve both high reflectance and improved high-temperature/process resistance. The specific compositions (Ag with 0.1-0.5 atom% Sm and 0.1-0.5 atom% Cu, or Ag with 0.1-3 atom% Bi and 0.1-5 atom% Nd) create materials that maintain optical performance while gaining thermal and chemical stability.

Inventive Principle:
Principle #40Composite materials

2Reliability

If Ag-C alloy film is used to improve high-temperature resistance, then process resistance improves, but reflectance is lowered

Engineering Contradiction:
Improveprocess resistanceVSAvoidreflectance
Core Design Contradiction:
ReliabilityVSIllumination intensity

Solution Approach 1:

The patent optimizes the compositional parameters of the alloy film by precisely controlling the atomic percentages of alloying elements. Instead of using Ag-C alloy, it employs Ag-Sm-Cu or Ag-Bi-Nd with specific compositions (Sm: 0.1-0.5 atom%, Cu: 0.1-0.5 atom%, or Bi: 0.1-3 atom%, Nd: 0.1-5 atom%) to achieve the optimal balance between reflectance and process resistance.

Inventive Principle:
Principle #35Parameter changes

3Illumination intensity

If alloy film thickness is increased to maintain reflectance, then light transmittance is lowered

Engineering Contradiction:
ImprovereflectanceVSAvoidlight transmittance
Core Design Contradiction:
Illumination intensityVSLoss of energy

Solution Approach 1:

The patent optimizes the thickness parameter of the alloy film to 30-80 nm, which is the optimal range that balances reflectance and transmittance. This thickness control, combined with the specific alloy composition, ensures that the mirror maintains high reflectance for the interference filter function while allowing sufficient light transmission for the detector to receive adequate signal.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

These alloy films effectively suppress the performance drop of interference filters by maintaining reflectance and transmittance stability across the visible light spectrum, even after processing and aging, ensuring reliable functionality.

Implementation Method 1

light is reflected between the pair of mirrors and only light having a specific wavelength is allowed to pass therethrough, while light having other wavelengths is cancelled by interference

Methodology Applied
Scientific EffectInterference: Interference

Implementation Method 2

the incident light between the two (a pair of) reflecting films that has entered from outside through one of the reflecting films is reflected between the reflecting films

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentEP2410368B1Interference filter, optical module, and analyzing device
Publication Date: 2017.10.18 SEIKO EPSON CORP
  • EP2410368B1 patent drawing
  • EP2410368B1 patent drawing
  • EP2410368B1 patent drawing

AI summary

An interference filter has a fixed mirror (56) and a movable mirror (57) that are formed of Ag-Sm-Cu alloy films that contain silver (Ag), samarium (Sm), and copper (Cu), or Ag-Bi-Nd alloy films that contains silver (Ag), bismuth (Bi), and neodymium (Nd).