Interference Objective Lens Spherical Mirror Adjustment
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Solution Overview
Problem
Conventional light interference measuring devices face complexity in adjusting the inclination of the reference mirror for generating interference fringes, requiring intricate movements of the interference objective lens barrel and holding frame, which complicates the measurement process.
Innovation Solution
An interference objective lens system with a beam splitter, a reference mirror, a mirror holding member with a spherical surface, and a support member with a spherical inner surface, along with a reference mirror adjusting mechanism that includes an adjusting screw, allows for easy adjustment of the mirror holding member's position and inclination, simplifying the adjustment of the reference mirror's orientation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the interference section lens barrel and holding frame are moved respectively to adjust the reference mirror angle, then the reference mirror inclination can be adjusted, but the structure and operating method become complicated
Solution Approach 1:
The patent combines the interference section lens barrel and the holding frame into a single integrated unit. The reference mirror is held by the holding frame, which is integrated with the interference section lens barrel, so that adjusting one component automatically adjusts the reference mirror angle without requiring separate movements of multiple components.
Solution Approach 2:
The holding frame serves multiple functions: it holds the reference mirror, provides the spherical outer surface for positioning, and is integrated with the interference section lens barrel. This multi-functional design eliminates the need for separate adjustment mechanisms for each function.
2Ease of operation
If a screw is pressed against an inclination surface of a V-shaped groove to adjust the reference mirror angle, then the angle can be adjusted by screwing amount, but the structure becomes complicated requiring precise V-shaped groove fabrication
Solution Approach 1:
The patent replaces the V-shaped groove with a spherical outer surface on the holding frame. The support member has a corresponding spherical inner surface that fits the spherical outer surface. This spherical geometry is easier to manufacture with standard machining processes and provides stable, repeatable positioning without requiring precise angular alignment of V-shaped grooves.
Solution Approach 2:
The patent changes the geometric parameters of the holding frame from a V-shaped cross-section to a spherical surface. This parameter change simplifies the manufacturing process while maintaining the ability to adjust the reference mirror angle through the screw mechanism pressing against the spherical surface.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables straightforward adjustment of the reference mirror's inclination, facilitating the generation of desired interference fringes and improving the ease of measurement in light interference measuring devices by reducing the complexity of the adjustment process.
Implementation Method 1
brightness information of an interference fringe generated by light interference
Implementation Method 2
a beam splitter which is placed between a measurement surface of a measuring object and a tip end of the objective lens system, which diverges light emitted from the objective lens system into a reference optical path and a measurement optical path
Implementation Method 3
a reference mirror which is placed in the reference optical path and which reflects, by the beam splitter, light diverged into the reference optical path
Implementation Method 4
a mirror holding member which has a spherical surface-shaped outer surface, and which holds the reference mirror such that a reflection surface of the reference mirror passes through a center of a spherical surface; and a support member which has a spherical surface-shaped inner surface having a diameter which is substantially equal to the outer surface of the mirror holding member
Data Source
AI summary
An interference objective lens includes: an objective lens system; a beam splitter which is placed between a measurement surface of a measuring object and a tip end of the objective lens, which diverges light emitted from the objective lens into a reference optical path and a measurement optical path, and which outputs combined wave in which reflection light passing through the reference optical path and reflection light passing through the measuring object are combined; a reference mirror which is placed in the reference optical path and which reflects, by the beam splitter, light diverged into the reference optical path; a mirror holding member which has a spherical surface-shaped outer surface, and which holds the reference mirror such that a reflection surface of the reference mirror passes through a center of a spherical surface; a support member which has a spherical surface-shaped inner surface having a diameter which is substantially equal to the outer surface of the mirror holding member, and which supports the outer surface of the mirror holding member by the inner surface; and a reference mirror adjusting mechanism which adjusts a position of the mirror holding member in the support member.