Interferometer Absolute Position Measurement Without Stable Reference Axis

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing interferometer systems are limited in determining the absolute position of movable objects due to the need for a stable reference axis and fast frequency modulating light sources, which complicates the measurement process and restricts their practical application.

Innovation Solution

A method and system using two light sources with different frequencies, one fixed and one tunable, to determine absolute position through a non-linear equation based on the relationship between wavelength and count offsets, eliminating the need for a stable reference axis and fast frequency modulation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a stable reference axis is used in interferometer systems, then measurement reliability is improved, but device complexity increases due to the need for separate zeroing sensors and stable reference structures

Engineering Contradiction:
Improvemeasurement reliabilityVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent extracts the reference axis requirement by using only measurement axes that track movable objects. The interferometer system determines absolute positions by measuring displacements along measurement axes without requiring a separate stable reference axis, thereby removing the complexity of maintaining reference structures while preserving measurement reliability through the use of multiple measurement axes and mathematical reconstruction algorithms

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent makes the measurement axes universal by having them serve dual purposes: both measuring relative displacements and determining absolute positions. The same measurement axes used for tracking movable objects also provide the basis for absolute position determination through mathematical reconstruction, eliminating the need for separate zeroing sensors and reference axis infrastructure

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Speed

If fast frequency modulation is implemented, then measurement speed is improved, but device complexity increases due to the need for fast frequency modulating light sources

Engineering Contradiction:
Improvemeasurement speedVSAvoiddevice complexity
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The patent replaces the mechanical/optical approach of fast frequency modulation with a mathematical processing approach. Instead of modulating light frequency at high speeds to encode position information, the system uses continuous wavelength scanning combined with mathematical reconstruction algorithms to determine absolute positions, thereby achieving measurement speed without requiring fast frequency modulating light sources

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces dynamic wavelength scanning of the light source as a controlled variation to enable absolute position determination. By continuously changing the wavelength and recording interference patterns throughout the scan, the system captures sufficient information to reconstruct absolute positions mathematically, replacing the need for static frequency modulation schemes

Inventive Principle:
Principle #15Dynamics

3Adaptability or versatility

If the measurement range is extended beyond the zeroing sensor range, then adaptability is improved, but measurement precision deteriorates because the movable object must be repeatedly brought back into the small measurement range

Engineering Contradiction:
Improvemeasurement rangeVSAvoidmeasurement precision
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent performs preliminary wavelength scanning to capture interference patterns that encode absolute position information before any displacement measurements are taken. By pre-establishing the relationship between wavelength, optical path length, and interference patterns through mathematical reconstruction, the system creates a reference framework that enables continuous absolute position determination without needing to repeatedly return the movable object to a zeroing sensor range

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent introduces mathematical reconstruction algorithms as an intermediary between the raw interferometer measurements and the final position determination. These algorithms process the interference patterns from multiple measurement axes to reconstruct absolute positions, serving as a mediator that translates limited-range measurements into extended-range absolute position information without losing precision

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate determination of absolute position without requiring a stable reference axis or fast frequency modulation, allowing for broader application in interferometer systems.

Implementation Method 1

interferometer system...guiding the first beam and the further first beam along a first measurement axis to a first reflective surface...to obtain a first interferometer signal

Methodology Applied
Scientific EffectInterference: Interference

Data Source

PatentUS20250327653A1Method to determine an absolute position of a movable object, interferometer system, projection system and lithograpic apparatus
Publication Date: 2025.10.23 ASML NETHERLANDS BV
  • US20250327653A1 patent drawing
  • US20250327653A1 patent drawing
  • US20250327653A1 patent drawing

AI summary

A method to determine an absolute position of a first movable object using an interferometer system is described, said method comprising: providing first and second beams with a first light frequency from a first light source: providing further first and further second beams with a second (tunable) light frequency from a second light source: guiding the first and further first beams along a first axis to a reflective surface of the first object to obtain a first interferometer signal and guiding the second and further second beams along a second axis to a reflective surface of a second object to obtain a second interferometer signal, while changing the tunable frequency, detecting the first and further first interferometer signals detecting the second and further second interferometer signals, determining a first count offset and/or a further first count offset using a non-linear equation, and determining the absolute position of the first object.