Interferometric Detector Phase Measurement Accuracy

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Solution Overview

Problem

The accuracy of polarization interferometers is limited by phase difference detector errors and environmental sensitivity, which affect the precision of distance and displacement measurements.

Innovation Solution

A novel configuration using a polarization-sensitive beam deflecting element, such as a Rochon or Wollaston prism, and a photodetector array to enhance phase difference measurement accuracy by introducing a divergence angle and spatially filtering the fringe pattern, providing improved reliability and reduced sensitivity to environmental variables.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a quadrature detector with multiple beam paths is used to measure phase difference, then the measurement capability is provided, but differential phase and amplitude errors occur due to component differences and alignment variations

Engineering Contradiction:
Improvephase difference measurement accuracyVSAvoidmeasurement reliability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent combines the reference beam and object beam into a single beam path after they traverse the interferometer arms. By using a polarizing beamsplitter to combine these beams spatially and temporally, the system eliminates the need for separate detection paths, thereby removing differential phase and amplitude errors that arise from component mismatches and alignment variations between multiple paths.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The polarizing beamsplitter serves multiple functions: it initially separates the input beam into orthogonal polarized components for the reference and object paths, and later recombines these beams for detection. This multi-functional component enables a compact single-path detector design that maintains interferometric measurement capability while eliminating path-related errors.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If quadrature detectors with multiple components are used, then phase difference detection is enabled, but environmental sensitivity and changes over time increase

Engineering Contradiction:
Improvephase difference detection capabilityVSAvoidenvironmental sensitivity
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

By merging the reference and object beams into a single detection path using a polarizing beamsplitter, the system minimizes the number of optical components and beam paths exposed to environmental variations. This reduction in system complexity directly decreases sensitivity to environmental factors such as temperature fluctuations, vibrations, and air currents that affect multiple separate components and alignment elements.

Inventive Principle:
Principle #5Merging (Combining)

3Measurement precision

If conventional detectors are used, then basic wavelength-level measurement is achieved, but interpolation accuracy is limited

Engineering Contradiction:
Improvebasic wavelength-level measurementVSAvoidinterpolation accuracy
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The patent introduces a polarization dimension to enable sub-wavelength interpolation. By measuring the phase difference between orthogonally polarized components of the combined beam and using quadrature detection on these polarization states, the system achieves interpolation accuracy of 1/1000 of a wavelength, far exceeding the basic wavelength-level measurement capability of conventional single-path detectors.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration achieves phase difference measurement accuracy beyond the basic wavelength level, offering interpolation levels of 1/1000 of a wavelength and improved reliability, while minimizing errors and environmental sensitivity.

Implementation Method 1

a polarization-sensitive beam deflecting element, which deflects one or both of the orthogonally polarized beams to provide a desired divergence angle between the between the beams

Methodology Applied
Scientific EffectPolarization: Polarisation

Implementation Method 2

the polarization-sensitive beam deflecting element may be a polarization-sensitive prism, such as a Rochon prism, a Wollaston prism, or a Senarmont prism

Methodology Applied
Scientific EffectBeam deflection: Refraction

Implementation Method 3

The diverging beams are input to a mixing polarizer, such that the beams exiting the mixing polarizer are similarly polarized and therefore interfere

Methodology Applied
Scientific EffectPolarization mixing: Polarisation

Implementation Method 4

The interfering diverging beams will then form interference fringes, which may be parallel fringes. The spatial phase of the fringes relative to the detector characterizes the phase difference between the object and reference beams

Methodology Applied
Scientific EffectInterference: Interference

Implementation Method 5

the spatial phase of the fringes relative to the detector may be sensed by a photodetector array configured to spatially filter the fringe pattern

Methodology Applied
Scientific EffectPhotoelectric detection: Photoelectric Effect

Data Source

PatentUS7333214B2Detector for interferometric distance measurement
Publication Date: 2008.02.19 MITUTOYO CORP
  • US7333214B2 patent drawing
  • US7333214B2 patent drawing
  • US7333214B2 patent drawing

AI summary

A detector for interferometric distance or displacement measurement. The detector may receive orthogonally polarized object and reference path output beams, which are directed to a polarization-sensitive beam deflecting element. The beam deflecting element deflects one or both orthogonally polarized beams to provide a desired divergence angle between the beams. The diverging beams are input to a mixing polarizer. The beams exiting the mixing polarizer are similarly polarized and therefore interfere. The interfering diverging beams form interference fringes. The spatial phase of the fringes relative to a photodetector array characterizes the phase difference between the object and reference beams of the interferometer.