Interferometric Detector Phase Shift Compensation

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Solution Overview

Problem

Conventional polarization interferometers face limitations in accuracy and reliability due to unwanted differential phase shifts introduced by beam splitter surfaces and coatings, which affect the phase difference measurement between reference and object beams, leading to measurement errors and reduced resolution.

Innovation Solution

The configuration of the detector arranges beam components to minimize differential phase shifts by making induced phase shifts common mode, eliminating net errors in phase difference measurements, and uses coatings or compensating elements to adjust specific phase shifts, ensuring accurate phase difference determination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional beam splitter surfaces and coatings are used in polarization interferometers, then the device structure is simple and easy to manufacture, but unwanted differential phase shifts are introduced between reference and object beams, leading to measurement errors and reduced accuracy

Engineering Contradiction:
Improvephase difference measurement accuracyVSAvoiddifferential phase shifts from beam splitter
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The patent converts the harmful differential phase shifts into beneficial common mode phase shifts by carefully designing the optical paths so that both reference and object beams experience identical phase shifts from beam splitter surfaces and coatings. This is achieved by ensuring symmetric passage through beam splitters and using compensating elements, thereby eliminating net differential phase errors while maintaining simple device structure

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent introduces compensating elements (such as additional beam splitters or phase compensators) that act as intermediaries to equalize the phase shifts experienced by reference and object beams. These compensating elements are positioned and configured to introduce opposite phase shifts that cancel out the unwanted differential phase shifts from primary beam splitter surfaces and coatings

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If conventional quadrature-type phase difference detectors are used, then the device complexity is low, but measurement errors occur due to unwanted differential phase shifts that are often unrecognized or incompletely compensated

Engineering Contradiction:
Improvephase difference detection reliabilityVSAvoidphase difference measurement accuracy
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent implements feedback mechanisms through signal processing operations that continuously monitor and correct for residual differential phase shifts. By using multiple detector signals and applying trigonometric relationships, the system can identify and compensate for phase errors, thereby improving both reliability and precision of measurements

Inventive Principle:
Principle #23Feedback

3Measurement precision

If beam splitter coatings are designed to control both transmissive and reflective differential phase shifts simultaneously, then measurement accuracy improves, but manufacturing complexity and cost increase significantly

Engineering Contradiction:
Improvephase difference measurement accuracyVSAvoidbeam splitter coating fabrication
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent segments the phase shift compensation function into separate components: one beam splitter handles the primary beam splitting while dedicated compensating elements handle the differential phase shift correction. This segmentation allows each component to be optimized independently, with beam splitter coatings focusing on basic splitting performance and compensating elements providing precise phase control, thereby simplifying manufacturing while maintaining accuracy

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly enhances measurement accuracy to smaller fractions of a wavelength, providing meaningful interpolation levels beyond previous limits, while simplifying and cost-effectively reducing errors in phase difference detection.

Implementation Method 1

a first beam splitting surface provides a first reflected beam and a first transmitted beam, wherein the first beam splitting surface is oriented such that polarization directions of coherent orthogonal, linearly polarized object and reference beam components in the input beam form equal angles with a first plane of incidence

Methodology Applied
Scientific EffectPolarization: Polarisation

Implementation Method 2

the first reflected beam is input to a second beam splitting surface that provides a second reflected beam, and that is polarizing

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 3

a second beam splitting surface that provides a second reflected beam, and that is polarizing, with a transmission axis of the second beam splitting surface aligned with one of the s-polarized and p-polarized components

Methodology Applied
Scientific EffectPolarization: Polarisation

Data Source

PatentUS7379187B2Detector configuration for interferometric distance measurement
Publication Date: 2008.05.27 MITUTOYO CORP
  • US7379187B2 patent drawing
  • US7379187B2 patent drawing
  • US7379187B2 patent drawing

AI summary

A phase difference detector generates a plurality of signals from an input beam including orthogonal, linearly polarized object and reference beam components. The detector may be configured such that as the reference and object beam components traverse the detector, phase shifts due to surface interactions are made as similar as possible between the s-components of the reference object beams, and between the p-components of the reference and object beams. Various outputs may be formed by interfering p-components exclusively, or s-components exclusively, negating errors that may otherwise arise due to differential phase shifts between p- and s-components. Phase-shifting elements in the detector may receive beams from beam splitting surfaces where the transmissive differential phase shift between p- and s-components is adjusted to insignificance.