Interferometer with Multi-Element Detector for True-Color 3D Surface Topography
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Solution Overview
Problem
Conventional interferometric surface profilers struggle to simultaneously capture high-resolution 3D topography and true-color information of surfaces, often compromising detector performance or increasing system costs by requiring separate metrology and color imaging capabilities.
Innovation Solution
An interferometry system equipped with a multi-element detector and an illumination module that generates multiple spectral light distributions, allowing for the simultaneous recording of interference patterns and color images, which are then processed to generate a true-color representation of the surface, combining shape and color information into a single 3D representation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If separate metrology and color imaging capabilities are used, then true-color information can be captured, but system costs increase and detector performance is compromised
Solution Approach 1:
The patent combines metrology and color imaging functions into a single interferometric system. The illumination module provides both coherent light for interferometry and broadband light for color imaging, while the detector captures both interference patterns and color information simultaneously, eliminating the need for separate imaging systems
Solution Approach 2:
The system employs multi-functional components: the illumination module generates multiple spectral distributions for different purposes, the detector serves both metrology and color imaging functions, and the optical path handles both interferometric and color imaging tasks, making each component perform multiple roles
2Loss of information
If separate metrology and color imaging systems are used, then both functions can be performed, but lateral and vertical resolution deteriorate
Solution Approach 1:
By merging metrology and color imaging into one system, the patent ensures that both functions share the same optical path and detector, guaranteeing that color information is captured at the same spatial resolution as the topography data, without the resolution degradation that occurs when using separate lower-resolution color cameras
3Device complexity
If a single multi-function light source is used, then system costs are reduced, but spectral distribution control becomes more difficult
Solution Approach 1:
The illumination module dynamically switches between different spectral distributions based on the operational mode. It can generate coherent narrowband light for interferometry, broadband light for color imaging, or tunable narrowband light for specific wavelength measurements, adapting its spectral output to the current measurement requirements
Solution Approach 2:
The system changes the spectral parameters of the illumination by selecting different operating modes of the light source. The illumination module can adjust its spectral distribution from broadband to narrowband, and from fixed wavelength to tunable wavelength, enabling the single light source to perform multiple functions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the capture of high-resolution 3D topography and true-color information without degrading detector performance, maintaining lateral and vertical resolution, and allowing for qualitative visual inspection and metrological analysis, while reducing system costs by using a single multi-function light source.
Implementation Method 1
an illumination module configured to generate multiple different spectral light distributions
Implementation Method 2
an imaging module configured to image, on the multi-element detector, a surface of a test object using test light, and to combine the test light, on the multi-element detector, with reference light to form an interference pattern
Data Source
AI summary
Systems and methods for generating 3D representations of shape and color texture of a test surface are described. In one aspect, surface topography interferometers are equipped with a multi-element detector and an illumination system to produce a true-color image of the measured object surface. Color information can be presented as a true-color two-dimensional image or combined with topography information to form a three-dimensional representation of the shape and color texture of the object, effectively creating for a human observer the impression of looking at the actual part.