Interferometer Measurement Module With Adjustable Optical Path Length
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Solution Overview
Problem
Existing laser processing systems face challenges in accurately and reliably determining distances for maintaining focus due to variability in optical path lengths, particularly when using adjustable focusing systems, which are often costly and complex to integrate, and existing distance measurement techniques are not suitable for on-axis configurations or are prone to inaccuracies.
Innovation Solution
A modular measurement module with an interferometer system that includes a housing with separate optical paths for interferometric distance detection, featuring an optical path length regulator system to adjust the optical path length of one path while maintaining a constant difference, allowing for continuous and accurate distance measurements despite variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If an adjustable focusing system is used to maintain focus over varying work distances, then the range of measurable distances is improved, but the device complexity and cost increase
Solution Approach 1:
The optical system is segmented into separate functional modules: a fixed focusing system for the work beam and a separate measuring module with its own optical path for distance measurement. This segmentation allows the focusing system to remain simple while the measuring module handles distance variations independently through optical path length adjustment.
Solution Approach 2:
An optical path length regulator system acts as an intermediary between the fixed focusing system and the variable work distances. This regulator compensates for optical path length variations in the measuring beam without requiring the focusing system to be reconfigured, thereby maintaining both simplicity and adaptability.
2Measurement precision
If distance measurement techniques are integrated for real-time focus compensation, then measurement precision is improved, but the device complexity increases
Solution Approach 1:
The measuring module is designed to perform multiple functions: it measures distance, determines optical path length variations, and provides compensation signals for focus maintenance. This multi-functionality is achieved within a single integrated module rather than through multiple separate systems, reducing overall complexity while maintaining precision.
Solution Approach 2:
The measuring module autonomously detects optical path length variations and generates compensation signals without requiring external intervention or complex external control systems. The system self-regulates by comparing the actual optical path length against reference values and automatically adjusting measurements accordingly.
3Measurement precision
If the optical path length is adjusted to compensate for work distance variations, then measurement precision is maintained, but the device complexity increases
Solution Approach 1:
The optical path length regulator system dynamically adjusts the optical path length of the measuring beam based on real-time work distance variations. This dynamic adjustment is achieved through movable optical elements that can be repositioned along the optical path, allowing continuous compensation without mechanical reconfiguration of the entire system.
Solution Approach 2:
The system changes the optical path length parameter of the measuring beam to compensate for work distance variations. By adjusting this specific parameter through movable mirrors or optical elements, the system maintains measurement precision without requiring changes to other system parameters or complex overall reconfiguration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and reliable distance determination, compensating for variations in optical path lengths without reconfiguring the focusing system, ensuring consistent focus and operational accuracy across varying work distances and deflection angles.
Implementation Method 1
distance detection device (40) configured for performing a distance detection based on an interference of measurement light (M) with reference light (P1)
Data Source
AI summary
Some examples refer to a measurement module for a laser processing apparatus in which a first optical path and a second optical path are defined for laser light within a housing. The first optical path has a fixed predefined optical path length. The second optical path is defined between a connection port of the housing and a coupling port and has a variable optical path length adjustable by an optical path length regulator system. An interferometer system includes a measurement module with a first optical path corresponding to a reference arm of the interferometer system and with a second optical path corresponding to an object arm of the interferometer system. An optical path length regulator system is configured for adjusting an optical path length of the second optical path. A laser processing apparatus includes a laser processing module for laser-processing a workpiece using a work beam and a measurement module.


